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High-thermal-conductivity silicon nitride ceramic and preparation method thereof
The invention provides a high-thermal-conductivity silicon nitride ceramic and a preparation method thereof. The high-thermal-conductivity silicon nitride ceramic is prepared from, by mass, 90.2%-96.7% of silicon nitride powder and 3.3%-9.8% of magnesium silicon nitride. The preparation method comprises the following steps: mixing silicon nitride powder, a solvent, magnesium silicon nitride, a binder and an additive to obtain a mixture, carrying out spray granulation on the mixture, then carrying out compression molding to obtain a biscuit, drying the biscuit, degreasing the biscuit, performing air pressure sintering on the degreased biscuit, wherein the highest temperature of the air pressure sintering is lower than 1750 DEG C, carrying out hot isostatic pressing sintering on the siliconnitride ceramic subjected to air pressure sintering, and carrying out annealing heat treatment on the silicon nitride ceramic subjected to hot isostatic pressing sintering. Oxygen-free magnesium silicon nitride is added, high densification of a ceramic structure is promoted through air pressure-hot isostatic pressing sintering, then crystal grains continue to grow abnormally through a heat treatment method in the second step, and the heat conductivity of the silicon nitride ceramic is improved.
本发明提供一种高热导率氮化硅陶瓷及其制备方法，按照质量百分比计，其制备原料包括：90.2％‑96.7％的氮化硅粉和3.3％‑9.8％的氮化硅镁。制备方法包括：将氮化硅粉、溶剂、氮化硅镁、粘结剂和添加剂混合，得到混合料；将混合料喷雾造粒，然后压制成型，得素坯；将素坯烘干，然后脱脂；将经过脱脂的素坯进行气压烧结，气压烧结的最高温度低于1750℃；将经过气压烧后的氮化硅陶瓷进行热等静压烧结；将热等静压烧结后的氮化硅陶瓷进行退火热处理。本发明加无氧氮化硅镁，利用气压‑热等静压烧结促使陶瓷组织高致密化，然后第二步再利用热处理的办法让晶粒继续异常长大，提高了氮化硅陶瓷的热导率。
High-thermal-conductivity silicon nitride ceramic and preparation method thereof
The invention provides a high-thermal-conductivity silicon nitride ceramic and a preparation method thereof. The high-thermal-conductivity silicon nitride ceramic is prepared from, by mass, 90.2%-96.7% of silicon nitride powder and 3.3%-9.8% of magnesium silicon nitride. The preparation method comprises the following steps: mixing silicon nitride powder, a solvent, magnesium silicon nitride, a binder and an additive to obtain a mixture, carrying out spray granulation on the mixture, then carrying out compression molding to obtain a biscuit, drying the biscuit, degreasing the biscuit, performing air pressure sintering on the degreased biscuit, wherein the highest temperature of the air pressure sintering is lower than 1750 DEG C, carrying out hot isostatic pressing sintering on the siliconnitride ceramic subjected to air pressure sintering, and carrying out annealing heat treatment on the silicon nitride ceramic subjected to hot isostatic pressing sintering. Oxygen-free magnesium silicon nitride is added, high densification of a ceramic structure is promoted through air pressure-hot isostatic pressing sintering, then crystal grains continue to grow abnormally through a heat treatment method in the second step, and the heat conductivity of the silicon nitride ceramic is improved.
本发明提供一种高热导率氮化硅陶瓷及其制备方法，按照质量百分比计，其制备原料包括：90.2％‑96.7％的氮化硅粉和3.3％‑9.8％的氮化硅镁。制备方法包括：将氮化硅粉、溶剂、氮化硅镁、粘结剂和添加剂混合，得到混合料；将混合料喷雾造粒，然后压制成型，得素坯；将素坯烘干，然后脱脂；将经过脱脂的素坯进行气压烧结，气压烧结的最高温度低于1750℃；将经过气压烧后的氮化硅陶瓷进行热等静压烧结；将热等静压烧结后的氮化硅陶瓷进行退火热处理。本发明加无氧氮化硅镁，利用气压‑热等静压烧结促使陶瓷组织高致密化，然后第二步再利用热处理的办法让晶粒继续异常长大，提高了氮化硅陶瓷的热导率。
High-thermal-conductivity silicon nitride ceramic and preparation method thereof
一种高热导率氮化硅陶瓷及其制备方法
GUAN JING (author) / SONG SUOCHENG (author) / GUAN JIASUO (author) / LI SHIJIA (author)
2020-07-03
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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