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Preparation method of bismuth-antimony-tellurium alloy target material
The invention discloses a preparation method of a bismuth-antimony-tellurium alloy target material. The preparation method comprises the following steps: weighing a bismuth raw material, an antimony raw material and a tellurium raw material according to the proportion required by the bismuth-antimony-tellurium alloy target material; putting the bismuth raw material, the antimony raw material and the tellurium raw material into a glass tube, vacuumizing, sealing the tube, and heating and smelting to obtain a bismuth-antimony-tellurium alloy melt; placing the bismuth-antimony-tellurium alloy melt in a crystal pulling furnace for zone melting to obtain a bismuth-antimony-tellurium alloy ingot; crushing and screening the bismuth-antimony-tellurium alloy ingot to obtain first bismuth-antimony-tellurium alloy powder; placing the bismuth-antimony-tellurium alloy powder in a ball mill to be repeatedly ground, and then obtaining second bismuth-antimony-tellurium alloy powder; placing the secondbismuth-antimony-tellurium alloy powder in a graphite mold and then placing in sintering equipment to be sintered, and obtaining a bismuth-antimony-tellurium alloy target blank; and machining the bismuth-antimony-tellurium alloy target blank to obtain the bismuth-antimony-tellurium alloy target material. The bismuth-antimony-tellurium alloy target material prepared through the method is high in purity, the relative density is larger than 99%, the performance is excellent, and various application requirements can be met.
本发明揭示了一种铋锑碲合金靶材的制备方法，包括：按铋锑碲合金靶材所需的配比称量铋原料、锑原料和碲原料；将铋原料、锑原料和碲原料置于玻璃管内进行抽真空后封管，并加热熔炼后得到铋锑碲合金熔体；将铋锑碲合金熔体置于拉晶炉内进行区域熔炼后得到铋锑碲合金锭；将铋锑碲合金锭进行粉碎并筛分后得到第一铋锑碲合金粉末；将铋锑碲合金粉末置于球磨机内反复研磨后得到第二铋锑碲合金粉末；将第二铋锑碲合金粉末置于石墨模具内，然后放入烧结设备中进行烧结后得到铋锑碲合金靶坯；将铋锑碲合金靶坯进行机加工后，得到铋锑碲合金靶材。本发明制备得到的铋锑碲合金靶材纯度高，相对密度大于99%，性能优异，能满足各种应用需求。
Preparation method of bismuth-antimony-tellurium alloy target material
The invention discloses a preparation method of a bismuth-antimony-tellurium alloy target material. The preparation method comprises the following steps: weighing a bismuth raw material, an antimony raw material and a tellurium raw material according to the proportion required by the bismuth-antimony-tellurium alloy target material; putting the bismuth raw material, the antimony raw material and the tellurium raw material into a glass tube, vacuumizing, sealing the tube, and heating and smelting to obtain a bismuth-antimony-tellurium alloy melt; placing the bismuth-antimony-tellurium alloy melt in a crystal pulling furnace for zone melting to obtain a bismuth-antimony-tellurium alloy ingot; crushing and screening the bismuth-antimony-tellurium alloy ingot to obtain first bismuth-antimony-tellurium alloy powder; placing the bismuth-antimony-tellurium alloy powder in a ball mill to be repeatedly ground, and then obtaining second bismuth-antimony-tellurium alloy powder; placing the secondbismuth-antimony-tellurium alloy powder in a graphite mold and then placing in sintering equipment to be sintered, and obtaining a bismuth-antimony-tellurium alloy target blank; and machining the bismuth-antimony-tellurium alloy target blank to obtain the bismuth-antimony-tellurium alloy target material. The bismuth-antimony-tellurium alloy target material prepared through the method is high in purity, the relative density is larger than 99%, the performance is excellent, and various application requirements can be met.
本发明揭示了一种铋锑碲合金靶材的制备方法，包括：按铋锑碲合金靶材所需的配比称量铋原料、锑原料和碲原料；将铋原料、锑原料和碲原料置于玻璃管内进行抽真空后封管，并加热熔炼后得到铋锑碲合金熔体；将铋锑碲合金熔体置于拉晶炉内进行区域熔炼后得到铋锑碲合金锭；将铋锑碲合金锭进行粉碎并筛分后得到第一铋锑碲合金粉末；将铋锑碲合金粉末置于球磨机内反复研磨后得到第二铋锑碲合金粉末；将第二铋锑碲合金粉末置于石墨模具内，然后放入烧结设备中进行烧结后得到铋锑碲合金靶坯；将铋锑碲合金靶坯进行机加工后，得到铋锑碲合金靶材。本发明制备得到的铋锑碲合金靶材纯度高，相对密度大于99%，性能优异，能满足各种应用需求。
Preparation method of bismuth-antimony-tellurium alloy target material
一种铋锑碲合金靶材的制备方法
CAI XINZHI (author) / ZHU LIU (author) / TONG PEIYUN (author) / RAN CHENGYI (author) / SU ZISHAN (author)
2021-03-02
Patent
Electronic Resource
Chinese
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