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Preparation method of conductive zinc telluride target material
The invention discloses a preparation method of a conductive zinc telluride target material. The preparation method of the conductive zinc telluride target material comprises the following steps of uniformly mixing zinc telluride powder and cuprous telluride powder, and carrying out hot pressed sintering to obtain the conductive zinc telluride target material. In the hot pressing sintering process, the pressure is increased to 45-70 MPa at the temperature of 500-900 DEG C, and then the temperature and the pressure are kept. The cuprous telluride is doped in the zinc telluride, so that the obtained zinc telluride target material has very good conductivity; zinc telluride powder and cuprous telluride powder are adopted as raw materials, hot pressed sintering is conducted at the low temperature, segregation in the sintering process is avoided, and what is ensured is that the obtained zinc telluride target material has good uniformity; and meanwhile, pressure is applied in the sintering process, so that the obtained zinc telluride target material has relatively high density.
本发明公开了一种导电性碲化锌靶材的制备方法。本发明导电性碲化锌靶材的制备方法包括以下步骤：将碲化锌粉末和碲化亚铜粉末混合均匀后进行热压烧结，得到导电性碲化锌靶材；其中热压烧结过程中，在500～900℃下加压至45～70MPa，再保温保压。本发明通过在碲化锌中掺杂碲化亚铜，使所得碲化锌靶材具有非常好的导电性；采用碲化锌粉末和碲化亚铜粉末作为原料，并在较低温度下进行热压烧结，避免烧结过程出现偏析，确保所得碲化锌靶材具有良好的均匀性；同时在烧结过程中施压，使所得碲化锌靶材具有较高的密度。
Preparation method of conductive zinc telluride target material
The invention discloses a preparation method of a conductive zinc telluride target material. The preparation method of the conductive zinc telluride target material comprises the following steps of uniformly mixing zinc telluride powder and cuprous telluride powder, and carrying out hot pressed sintering to obtain the conductive zinc telluride target material. In the hot pressing sintering process, the pressure is increased to 45-70 MPa at the temperature of 500-900 DEG C, and then the temperature and the pressure are kept. The cuprous telluride is doped in the zinc telluride, so that the obtained zinc telluride target material has very good conductivity; zinc telluride powder and cuprous telluride powder are adopted as raw materials, hot pressed sintering is conducted at the low temperature, segregation in the sintering process is avoided, and what is ensured is that the obtained zinc telluride target material has good uniformity; and meanwhile, pressure is applied in the sintering process, so that the obtained zinc telluride target material has relatively high density.
本发明公开了一种导电性碲化锌靶材的制备方法。本发明导电性碲化锌靶材的制备方法包括以下步骤：将碲化锌粉末和碲化亚铜粉末混合均匀后进行热压烧结，得到导电性碲化锌靶材；其中热压烧结过程中，在500～900℃下加压至45～70MPa，再保温保压。本发明通过在碲化锌中掺杂碲化亚铜，使所得碲化锌靶材具有非常好的导电性；采用碲化锌粉末和碲化亚铜粉末作为原料，并在较低温度下进行热压烧结，避免烧结过程出现偏析，确保所得碲化锌靶材具有良好的均匀性；同时在烧结过程中施压，使所得碲化锌靶材具有较高的密度。
Preparation method of conductive zinc telluride target material
一种导电性碲化锌靶材的制备方法
WEN CHONGBIN (author) / YU FANG (author) / ZHU LIU (author) / TONG PEIYUN (author) / HU ZHIXIANG (author) / ZENG CHENGLIANG (author)
2021-07-16
Patent
Electronic Resource
Chinese
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