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Ceramic material and preparation method of plasma-resistant coating of ceramic material
The invention discloses a ceramic material and a preparation method of a plasma-resistant coating of the ceramic material. The ceramic material is formed by mixing oxide powder of the following elements, the elements comprise 50-70% of Y, 5-15% of W, 5-10% of Mg, 5-10% of Si, 5-10% of Al and 5-15% of Zr according to the atomic number, and the diameter of the oxide powder of the elements is 10-100 [mu] m. The plasma-resistant coating prepared from the ceramic material has higher ductility and compactness and higher plasma erosion resistance, so that the service life of equipment parts in the chip and panel machining process can be remarkably prolonged, and the cost of purchasing equipment accessories in a chip and panel factory is effectively reduced.
本发明公开了一种陶瓷材料及其耐等离子涂层的制备方法，所述陶瓷材料由以下元素的氧化物粉末混合而成，所述元素包括Y、W、Mg、Si、Al和Zr，所述元素按原子数量计含量为：50～70％的Y、5～15％的W、5～10％的Mg、5～10％的Si、5～10％的Al和5～15％的Zr，所述元素的氧化物粉末的直径为10～100μm。使用所述陶瓷材料制备的耐等离子涂层，有更好的延展性、致密性，且有更强的耐等离子侵蚀的性能，从而可以显著延长设备部件在芯片和面板加工过程中的使用寿命，有效降低芯片和面板工厂在采购设备配件上的成本。
Ceramic material and preparation method of plasma-resistant coating of ceramic material
The invention discloses a ceramic material and a preparation method of a plasma-resistant coating of the ceramic material. The ceramic material is formed by mixing oxide powder of the following elements, the elements comprise 50-70% of Y, 5-15% of W, 5-10% of Mg, 5-10% of Si, 5-10% of Al and 5-15% of Zr according to the atomic number, and the diameter of the oxide powder of the elements is 10-100 [mu] m. The plasma-resistant coating prepared from the ceramic material has higher ductility and compactness and higher plasma erosion resistance, so that the service life of equipment parts in the chip and panel machining process can be remarkably prolonged, and the cost of purchasing equipment accessories in a chip and panel factory is effectively reduced.
本发明公开了一种陶瓷材料及其耐等离子涂层的制备方法，所述陶瓷材料由以下元素的氧化物粉末混合而成，所述元素包括Y、W、Mg、Si、Al和Zr，所述元素按原子数量计含量为：50～70％的Y、5～15％的W、5～10％的Mg、5～10％的Si、5～10％的Al和5～15％的Zr，所述元素的氧化物粉末的直径为10～100μm。使用所述陶瓷材料制备的耐等离子涂层，有更好的延展性、致密性，且有更强的耐等离子侵蚀的性能，从而可以显著延长设备部件在芯片和面板加工过程中的使用寿命，有效降低芯片和面板工厂在采购设备配件上的成本。
Ceramic material and preparation method of plasma-resistant coating of ceramic material
一种陶瓷材料及其耐等离子涂层的制备方法
ZHANG LIXIANG (author) / ZHAO KAI (author)
2021-10-15
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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