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Strontium ruthenate material, and preparation method and application thereof
The invention discloses a strontium ruthenate material, and a preparation method and application thereof, and belongs to the technical field of strontium ruthenate materials. The preparation method comprises the following steps: performing vacuum hot pressing sintering on raw materials for preparing the strontium ruthenate material, wherein the vacuum hot pressing sintering conditions are as follows: the vacuum degree is less than or equal to 10<-3> Pa, the hot pressing temperature is 600-850 DEG C, the hot pressing pressure is 58.5-100MPa, and the hot pressing time is 3-3.5 h. Vacuum hot pressed sintering is carried out under the conditions, and the strontium ruthenate material with high density, high purity and strict atomic proportion can be prepared. The strontium ruthenate material can be used for processing sputtering target materials and the like, and in the sputtering process, particle defects are reduced, and the product quality is improved.
本发明公开了一种钌酸锶材料及其制备方法与应用，属于钌酸锶材料技术领域。该制备方法包括：对钌酸锶材料的制备原料进行真空热压烧结，真空热压烧结条件包括：真空度≤10‑3Pa，热压温度为600‑850℃，热压压力为58.5‑100MPa，热压时间为3‑3.5h。采用上述条件进行真空热压烧结，可制得具有高致密度、高纯度以及严格原子比例的钌酸锶材料。上述钌酸锶材料可用于加工溅射靶材等，在溅射过程中，有利于降低颗粒缺陷，提高产品品质。
Strontium ruthenate material, and preparation method and application thereof
The invention discloses a strontium ruthenate material, and a preparation method and application thereof, and belongs to the technical field of strontium ruthenate materials. The preparation method comprises the following steps: performing vacuum hot pressing sintering on raw materials for preparing the strontium ruthenate material, wherein the vacuum hot pressing sintering conditions are as follows: the vacuum degree is less than or equal to 10<-3> Pa, the hot pressing temperature is 600-850 DEG C, the hot pressing pressure is 58.5-100MPa, and the hot pressing time is 3-3.5 h. Vacuum hot pressed sintering is carried out under the conditions, and the strontium ruthenate material with high density, high purity and strict atomic proportion can be prepared. The strontium ruthenate material can be used for processing sputtering target materials and the like, and in the sputtering process, particle defects are reduced, and the product quality is improved.
本发明公开了一种钌酸锶材料及其制备方法与应用，属于钌酸锶材料技术领域。该制备方法包括：对钌酸锶材料的制备原料进行真空热压烧结，真空热压烧结条件包括：真空度≤10‑3Pa，热压温度为600‑850℃，热压压力为58.5‑100MPa，热压时间为3‑3.5h。采用上述条件进行真空热压烧结，可制得具有高致密度、高纯度以及严格原子比例的钌酸锶材料。上述钌酸锶材料可用于加工溅射靶材等，在溅射过程中，有利于降低颗粒缺陷，提高产品品质。
Strontium ruthenate material, and preparation method and application thereof
一种钌酸锶材料及其制备方法与应用
LI ZONGYU (author) / QIU LI'AN (author) / LIANG FANG (author) / HAN ZHENGFEI (author) / LU BO (author)
2021-12-03
Patent
Electronic Resource
Chinese
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