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The invention relates to a split type combined quartz crucible mold which comprises an inner shell formed by combining and stacking a plurality of high-purity quartz ceramic pieces. A water cooling circulation sleeve sleeves outside the inner shell, an air exhaust gap is reserved between the water cooling circulation sleeve and the outer wall of the inner shell, vacuumizing holes communicated with the air exhaust gap are formed in the high-purity quartz ceramic pieces, and the bottom of the water cooling circulation sleeve is fixedly communicated with a vacuumizing pipeline communicated with the air exhaust gap. The split type combined quartz crucible mold provided by the invention is of a split type structure, has the advantages of being small in expansion coefficient and good in thermal shock property and is not prone to expansion deformation at the high temperature, the high-purity quartz ceramic pieces are made of high-purity silicon dioxide, no pollution is caused when the high-purity quartz ceramic pieces make contact with high-purity quartz sand used as a crucible raw material, each mold is long in service cycle, and the production cost of the crucible is effectively reduced.
一种分体式组合石英坩埚模具,包括由若干高纯石英陶瓷件组合码砌而成的内壳,在内壳外套装有水冷却循环套,在水冷却循环套与内壳外壁之间留有抽气间隙,在高纯石英陶瓷件上均开设有与抽气间隙连通的抽真空孔,在水冷却循环套的底部固定连通有与抽气间隙连通的抽真空管道。本申请提供的分体式组合石英坩埚模具为分体式结构,具有膨胀系数小、热震性好的优点,在高温下不易膨胀变型,并且高纯石英陶瓷件采用高纯二氧化硅制成,与坩埚原料用的高纯石英砂接触无污染,每只模具使用周期长,有效降低了坩埚的生产成本。
The invention relates to a split type combined quartz crucible mold which comprises an inner shell formed by combining and stacking a plurality of high-purity quartz ceramic pieces. A water cooling circulation sleeve sleeves outside the inner shell, an air exhaust gap is reserved between the water cooling circulation sleeve and the outer wall of the inner shell, vacuumizing holes communicated with the air exhaust gap are formed in the high-purity quartz ceramic pieces, and the bottom of the water cooling circulation sleeve is fixedly communicated with a vacuumizing pipeline communicated with the air exhaust gap. The split type combined quartz crucible mold provided by the invention is of a split type structure, has the advantages of being small in expansion coefficient and good in thermal shock property and is not prone to expansion deformation at the high temperature, the high-purity quartz ceramic pieces are made of high-purity silicon dioxide, no pollution is caused when the high-purity quartz ceramic pieces make contact with high-purity quartz sand used as a crucible raw material, each mold is long in service cycle, and the production cost of the crucible is effectively reduced.
一种分体式组合石英坩埚模具,包括由若干高纯石英陶瓷件组合码砌而成的内壳,在内壳外套装有水冷却循环套,在水冷却循环套与内壳外壁之间留有抽气间隙,在高纯石英陶瓷件上均开设有与抽气间隙连通的抽真空孔,在水冷却循环套的底部固定连通有与抽气间隙连通的抽真空管道。本申请提供的分体式组合石英坩埚模具为分体式结构,具有膨胀系数小、热震性好的优点,在高温下不易膨胀变型,并且高纯石英陶瓷件采用高纯二氧化硅制成,与坩埚原料用的高纯石英砂接触无污染,每只模具使用周期长,有效降低了坩埚的生产成本。
Split type combined quartz crucible mold
分体式组合石英坩埚模具
CHEN HUAIBIN (author)
2022-01-21
Patent
Electronic Resource
Chinese
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