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Plasma deposition method and equipment for rapidly preparing high-performance carbon-ceramic composite material
The invention discloses a plasma deposition method and equipment for quickly preparing a high-performance carbon-ceramic composite material, which comprises the following steps: putting a carbon-ceramic fiber preform into a vacuum chamber, connecting the carbon-ceramic fiber preform with a high-voltage power supply, arranging an induction coil outside the carbon-ceramic fiber preform, forming high-temperature plasma under vacuum and high pressure by a gas medium introduced into the vacuum chamber, and performing high-temperature plasma deposition on the high-temperature plasma to obtain the high-performance carbon-ceramic composite material. Wherein negatively charged molecular groups impact the carbon ceramic fiber preform at a high speed under the action of electric field force for deposition. According to the method, the plasma gas source is used as a medium, the high-performance carbon-ceramic composite material is prepared through chemical vapor deposition, the processing efficiency is high, and the density is high. The plasma deposition equipment is simple in structure, low in energy consumption and high in processing efficiency, and can be used for rapidly densifying the preform.
本发明公开一种快速制备高性能碳陶复合材料的等离子沉积方法及设备，将碳陶纤维预制体放入真空室中，碳陶纤维预制体与高压电源连接，碳陶纤维预制体外设感应线圈，通入真空室中的气体介质在真空高压下形成高温等离子体，其中带负电的分子基团在电场力作用下高速撞击碳陶纤维预制体进行沉积。该方法以等离子气源为介质，通过化学气相沉积来制备高性能碳陶复合材料，加工效率高、致密度高。等离子沉积设备结构简单，可对预制体快速致密化，设备能耗低，加工效率高。
Plasma deposition method and equipment for rapidly preparing high-performance carbon-ceramic composite material
The invention discloses a plasma deposition method and equipment for quickly preparing a high-performance carbon-ceramic composite material, which comprises the following steps: putting a carbon-ceramic fiber preform into a vacuum chamber, connecting the carbon-ceramic fiber preform with a high-voltage power supply, arranging an induction coil outside the carbon-ceramic fiber preform, forming high-temperature plasma under vacuum and high pressure by a gas medium introduced into the vacuum chamber, and performing high-temperature plasma deposition on the high-temperature plasma to obtain the high-performance carbon-ceramic composite material. Wherein negatively charged molecular groups impact the carbon ceramic fiber preform at a high speed under the action of electric field force for deposition. According to the method, the plasma gas source is used as a medium, the high-performance carbon-ceramic composite material is prepared through chemical vapor deposition, the processing efficiency is high, and the density is high. The plasma deposition equipment is simple in structure, low in energy consumption and high in processing efficiency, and can be used for rapidly densifying the preform.
本发明公开一种快速制备高性能碳陶复合材料的等离子沉积方法及设备，将碳陶纤维预制体放入真空室中，碳陶纤维预制体与高压电源连接，碳陶纤维预制体外设感应线圈，通入真空室中的气体介质在真空高压下形成高温等离子体，其中带负电的分子基团在电场力作用下高速撞击碳陶纤维预制体进行沉积。该方法以等离子气源为介质，通过化学气相沉积来制备高性能碳陶复合材料，加工效率高、致密度高。等离子沉积设备结构简单，可对预制体快速致密化，设备能耗低，加工效率高。
Plasma deposition method and equipment for rapidly preparing high-performance carbon-ceramic composite material
快速制备高性能碳陶复合材料的等离子沉积方法及设备
ZHANG TAO (author) / ZHANG PENG (author) / ZHONG BO (author) / HAO HUANMIN (author) / FAN LIJUN (author)
2022-03-22
Patent
Electronic Resource
Chinese
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