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Casting diaphragm for preparing oxygen sensor chip and preparation process of casting diaphragm
The invention discloses a casting diaphragm for preparing an oxygen sensor chip. A zirconium oxide diaphragm is prepared from the following components in percentage by weight: 62-65wt% of zirconium oxide powder; 0.5 to 0.7 wt% of a dispersant; 0.3 to 0.4 wt% of a defoaming agent; 2.4 to 2.6 wt% of a plasticizer; 4 to 6 wt% of an adhesive; 25-30 wt% of an organic solvent, wherein the sum of the above components is 100 wt%; the formula of the aluminum oxide membrane comprises the following components in percentage by weight: 40-43 wt% of aluminum oxide powder; 0.7 to 1.0 wt% of a fluxing agent; 0.3 to 0.5 wt% of a dispersant; 0.2 to 0.3 wt% of a defoaming agent; 1.0 to 1.5 wt% of a plasticizer; 7 to 8.5 wt% of an adhesive; 45-50 wt% of an organic solvent, wherein the sum of the above components is 100 wt%. The diaphragm is high in plastic strength and good in processing performance, the breakage rate and dark cracks in the punching, printing and laminating processes can be effectively reduced, and the firing yield of chips is increased.
本发明公开了一种用于制备氧传感器芯片的流延膜片,氧化锆膜片按重量百分比的配方如下:氧化锆粉体:62~65wt%;分散剂:0.5~0.7wt%;消泡剂:0.3~0.4wt%;塑化剂:2.4~2.6wt%;黏结剂:4~6wt%;有机溶剂:25~30wt%,上述组分之和为100wt%;氧化铝膜片按重量百分比的配方如下:氧化铝粉体:40~43wt%;助熔剂:0.7~1.0wt%;分散剂:0.3~0.5wt%;消泡剂:0.2~0.3wt%;塑化剂:1.0~1.5wt%;黏结剂:7~8.5wt%;有机溶剂:45~50wt%,上述组分之和为100wt%。该膜片塑性强度高、加工性能良好,能够有效减少打孔、印刷及叠片过程中的破损率及暗裂纹的产生,提高芯片烧成良率。
Casting diaphragm for preparing oxygen sensor chip and preparation process of casting diaphragm
The invention discloses a casting diaphragm for preparing an oxygen sensor chip. A zirconium oxide diaphragm is prepared from the following components in percentage by weight: 62-65wt% of zirconium oxide powder; 0.5 to 0.7 wt% of a dispersant; 0.3 to 0.4 wt% of a defoaming agent; 2.4 to 2.6 wt% of a plasticizer; 4 to 6 wt% of an adhesive; 25-30 wt% of an organic solvent, wherein the sum of the above components is 100 wt%; the formula of the aluminum oxide membrane comprises the following components in percentage by weight: 40-43 wt% of aluminum oxide powder; 0.7 to 1.0 wt% of a fluxing agent; 0.3 to 0.5 wt% of a dispersant; 0.2 to 0.3 wt% of a defoaming agent; 1.0 to 1.5 wt% of a plasticizer; 7 to 8.5 wt% of an adhesive; 45-50 wt% of an organic solvent, wherein the sum of the above components is 100 wt%. The diaphragm is high in plastic strength and good in processing performance, the breakage rate and dark cracks in the punching, printing and laminating processes can be effectively reduced, and the firing yield of chips is increased.
本发明公开了一种用于制备氧传感器芯片的流延膜片,氧化锆膜片按重量百分比的配方如下:氧化锆粉体:62~65wt%;分散剂:0.5~0.7wt%;消泡剂:0.3~0.4wt%;塑化剂:2.4~2.6wt%;黏结剂:4~6wt%;有机溶剂:25~30wt%,上述组分之和为100wt%;氧化铝膜片按重量百分比的配方如下:氧化铝粉体:40~43wt%;助熔剂:0.7~1.0wt%;分散剂:0.3~0.5wt%;消泡剂:0.2~0.3wt%;塑化剂:1.0~1.5wt%;黏结剂:7~8.5wt%;有机溶剂:45~50wt%,上述组分之和为100wt%。该膜片塑性强度高、加工性能良好,能够有效减少打孔、印刷及叠片过程中的破损率及暗裂纹的产生,提高芯片烧成良率。
Casting diaphragm for preparing oxygen sensor chip and preparation process of casting diaphragm
一种用于制备氧传感器芯片的流延膜片及其制备工艺
CHENG HUI (author) / WANG LIANG (author)
2022-07-01
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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