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Preparation method of bismuth titanate series ferroelectric film
The invention relates to a preparation method of a bismuth titanate series ferroelectric film, and belongs to the field of ferroelectric film preparation. According to the invention, a layer of bismuth titanate series film with defects is prepared by adopting a sol-gel method, then magnetron sputtering coating is carried out on the film layer, and annealing treatment is carried out, so that the film with larger grain size can be obtained, and the film has better anti-fatigue performance due to higher quality and fewer defects. The ferroelectric film prepared by the method is large in grain size, the longitudinal size can reach 2 microns, and the ferroelectric film has good anti-fatigue performance and has potential application value in capacitors, piezoelectric elements and ferroelectric elements. According to the preparation method, a sol-gel method and magnetron sputtering are combined, the defect that the film fails due to the fact that the heat treatment temperature of the film is too high is overcome, and preparation of the high-quality ferroelectric film is facilitated.
本发明涉及一种钛酸铋系列铁电薄膜的制备方法，属于铁电薄膜制备领域。本发明先采用溶胶‑凝胶法制备一层具有缺陷的钛酸铋系列薄膜，然后在该薄膜层上进行磁控溅射镀膜，再进行退火处理，可以得到晶粒尺寸较大的薄膜，而且由于薄膜的质量较高、缺陷较少，薄膜的抗疲劳性能较好。该方法制备的铁电薄膜晶粒尺寸较大，纵向尺寸能够达到2μm，并且具备良好的抗疲劳性能，在电容器、压电元件和铁电元件中具有潜在的应用价值。本发明的制备方法为溶胶‑凝胶法和磁控溅射相结合，克服了薄膜热处理温度过高而产生缺陷以致薄膜失效的缺点，有利于制备出高质量的铁电薄膜。
Preparation method of bismuth titanate series ferroelectric film
The invention relates to a preparation method of a bismuth titanate series ferroelectric film, and belongs to the field of ferroelectric film preparation. According to the invention, a layer of bismuth titanate series film with defects is prepared by adopting a sol-gel method, then magnetron sputtering coating is carried out on the film layer, and annealing treatment is carried out, so that the film with larger grain size can be obtained, and the film has better anti-fatigue performance due to higher quality and fewer defects. The ferroelectric film prepared by the method is large in grain size, the longitudinal size can reach 2 microns, and the ferroelectric film has good anti-fatigue performance and has potential application value in capacitors, piezoelectric elements and ferroelectric elements. According to the preparation method, a sol-gel method and magnetron sputtering are combined, the defect that the film fails due to the fact that the heat treatment temperature of the film is too high is overcome, and preparation of the high-quality ferroelectric film is facilitated.
本发明涉及一种钛酸铋系列铁电薄膜的制备方法，属于铁电薄膜制备领域。本发明先采用溶胶‑凝胶法制备一层具有缺陷的钛酸铋系列薄膜，然后在该薄膜层上进行磁控溅射镀膜，再进行退火处理，可以得到晶粒尺寸较大的薄膜，而且由于薄膜的质量较高、缺陷较少，薄膜的抗疲劳性能较好。该方法制备的铁电薄膜晶粒尺寸较大，纵向尺寸能够达到2μm，并且具备良好的抗疲劳性能，在电容器、压电元件和铁电元件中具有潜在的应用价值。本发明的制备方法为溶胶‑凝胶法和磁控溅射相结合，克服了薄膜热处理温度过高而产生缺陷以致薄膜失效的缺点，有利于制备出高质量的铁电薄膜。
Preparation method of bismuth titanate series ferroelectric film
一种钛酸铋系列铁电薄膜的制备方法
CHENG XINGWANG (author) / WANG HONGKE (author) / MA SHUAI (author) / ZHANG CHAOHUI (author)
2022-08-09
Patent
Electronic Resource
Chinese
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