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High-purity alumina ceramic gradient coating metallization method
The invention discloses a high-purity aluminum oxide ceramic gradient coating metallization method. The surface of high-purity aluminum oxide corundum ceramic is coated with a bottom-layer metallization paste material with low molybdenum content and high glass phase content in a silk-screen printing mode; and then a layer of high-molybdenum-content and low-glass-phase-content metallization paste is coated in a certain mode, and a gradient metallization layer coating is formed. The method for gradient coating of the metallization layer can be combined with a classic powder metallization process, and considers the weldability of the surface layer of the metallization layer, the easy secondary metallization property, the moist binding property of the bottom layer of the metallization layer and the substrate ceramic material, and the structural stability of the metallization layer; and the mechanical property and the air tightness of the high-purity alumina corundum ceramic and metal sealing sample are improved. The sealing strength of the obtained high-purity alumina corundum ceramic metallization layer and the kovar alloy can reach 95-115 MPa, and the He leakage rate can reach 0.5 * 10 <-10 > to 1.0 * 10 <-10 > Pa.m < 3 >/s or below.
本发明公开了一种高纯氧化铝陶瓷梯度涂层金属化方法，通过丝网印刷方式在高纯氧化铝刚玉陶瓷表面涂覆底层低钼含量高玻璃相含量金属化膏料；再通过一定的方式涂覆一层高钼含量低玻璃相含量金属化膏料，形成梯度金属化层涂层。该梯度涂覆金属化层的方法，能结合经典粉末金属化工艺，兼顾金属化层表层的可焊性、易于二次金属化性和金属化层底层与衬底陶瓷材料㓎润与结合性问题及金属化层本身结构稳定性问题，提高了高纯氧化铝刚玉陶瓷与金属封接试样的力学性能和气密性。本发明所获得的高纯氧化铝刚玉陶瓷金属化层与可伐合金的封接强度可达95～115MPa，He泄漏率可达到0.5x10‑10～1.0x10‑10Pa.m3/s量级以下。
High-purity alumina ceramic gradient coating metallization method
The invention discloses a high-purity aluminum oxide ceramic gradient coating metallization method. The surface of high-purity aluminum oxide corundum ceramic is coated with a bottom-layer metallization paste material with low molybdenum content and high glass phase content in a silk-screen printing mode; and then a layer of high-molybdenum-content and low-glass-phase-content metallization paste is coated in a certain mode, and a gradient metallization layer coating is formed. The method for gradient coating of the metallization layer can be combined with a classic powder metallization process, and considers the weldability of the surface layer of the metallization layer, the easy secondary metallization property, the moist binding property of the bottom layer of the metallization layer and the substrate ceramic material, and the structural stability of the metallization layer; and the mechanical property and the air tightness of the high-purity alumina corundum ceramic and metal sealing sample are improved. The sealing strength of the obtained high-purity alumina corundum ceramic metallization layer and the kovar alloy can reach 95-115 MPa, and the He leakage rate can reach 0.5 * 10 <-10 > to 1.0 * 10 <-10 > Pa.m < 3 >/s or below.
本发明公开了一种高纯氧化铝陶瓷梯度涂层金属化方法，通过丝网印刷方式在高纯氧化铝刚玉陶瓷表面涂覆底层低钼含量高玻璃相含量金属化膏料；再通过一定的方式涂覆一层高钼含量低玻璃相含量金属化膏料，形成梯度金属化层涂层。该梯度涂覆金属化层的方法，能结合经典粉末金属化工艺，兼顾金属化层表层的可焊性、易于二次金属化性和金属化层底层与衬底陶瓷材料㓎润与结合性问题及金属化层本身结构稳定性问题，提高了高纯氧化铝刚玉陶瓷与金属封接试样的力学性能和气密性。本发明所获得的高纯氧化铝刚玉陶瓷金属化层与可伐合金的封接强度可达95～115MPa，He泄漏率可达到0.5x10‑10～1.0x10‑10Pa.m3/s量级以下。
High-purity alumina ceramic gradient coating metallization method
一种高纯氧化铝陶瓷梯度涂层金属化方法
LI DONGCAI (author) / HE CANGBAO (author) / WANG YONGSHENG (author) / CHEN JING (author) / XIAO BIHUA (author)
2022-09-16
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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