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High-entropy fluorite oxide target material and preparation method thereof
The preparation method comprises the following steps: S1, weighing ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder, respectively putting the ZrO2 powder, the HfO2 powder, the CeO2 powder, the Y2O3 powder, the La2O3 powder and the Pr6O11 powder into a crucible, and calcining in a muffle furnace to remove moisture and impurities; s2, the calcined ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder are mixed and placed in a planetary ball mill, and after ball milling is finished, slurry is placed in a drying box to be dried to obtain high-entropy ceramic powder with uniform components; s3, the high-entropy ceramic powder is granulated and then sequentially put into a hydraulic machine and a cold isostatic pressing machine to be pressed, and a ceramic green body is obtained; and S4, the ceramic green body is placed in an atmosphere sintering furnace, a (ZrHfCeYLaPr) O2-delta high-entropy ceramic block body is obtained, then the (ZrHfCeYLaPr) O2-delta high-entropy ceramic block body is subjected to machining, cleaning and drying, and the high-entropy oxide target material with the fluorite structure is obtained. According to the high-entropy fluorite oxide target material with the structure and the preparation method of the high-entropy fluorite oxide target material, the six-component high-entropy oxide target material with relatively high purity and density is prepared by using the oxide powder with equal molar ratio.
本发明公开了一种高熵萤石氧化物靶材及其制备方法，S1、称取ZrO2、HfO2、CeO2、Y2O3、La2O3、Pr6O11粉末分别置于坩埚中，在马弗炉中煅烧以去除水分和杂质；S2、将煅烧后的ZrO2、HfO2、CeO2、Y2O3、La2O3、Pr6O11粉末混合置于行星式球磨机中，球磨结束后，将浆料置于干燥箱中烘干得到成分均匀的高熵陶瓷粉体；S3、将高熵陶瓷粉体造粒后依次放入液压机和冷等静压机机中压制得到陶瓷生胚；S4、将陶瓷生坯置于气氛烧结炉中，获得(ZrHfCeYLaPr)O2‑δ高熵陶瓷块体，随后对(ZrHfCeYLaPr)O2‑δ高熵陶瓷块体进行机械加工后清洗烘干，得到具有萤石结构的高熵氧化物靶材。本发明采用上述结构的一种高熵萤石氧化物靶材及其制备方法，使用等摩尔比的氧化物粉末，制备出纯度以及致密度较高的六组分高熵氧化物靶材。
High-entropy fluorite oxide target material and preparation method thereof
The preparation method comprises the following steps: S1, weighing ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder, respectively putting the ZrO2 powder, the HfO2 powder, the CeO2 powder, the Y2O3 powder, the La2O3 powder and the Pr6O11 powder into a crucible, and calcining in a muffle furnace to remove moisture and impurities; s2, the calcined ZrO2 powder, HfO2 powder, CeO2 powder, Y2O3 powder, La2O3 powder and Pr6O11 powder are mixed and placed in a planetary ball mill, and after ball milling is finished, slurry is placed in a drying box to be dried to obtain high-entropy ceramic powder with uniform components; s3, the high-entropy ceramic powder is granulated and then sequentially put into a hydraulic machine and a cold isostatic pressing machine to be pressed, and a ceramic green body is obtained; and S4, the ceramic green body is placed in an atmosphere sintering furnace, a (ZrHfCeYLaPr) O2-delta high-entropy ceramic block body is obtained, then the (ZrHfCeYLaPr) O2-delta high-entropy ceramic block body is subjected to machining, cleaning and drying, and the high-entropy oxide target material with the fluorite structure is obtained. According to the high-entropy fluorite oxide target material with the structure and the preparation method of the high-entropy fluorite oxide target material, the six-component high-entropy oxide target material with relatively high purity and density is prepared by using the oxide powder with equal molar ratio.
本发明公开了一种高熵萤石氧化物靶材及其制备方法，S1、称取ZrO2、HfO2、CeO2、Y2O3、La2O3、Pr6O11粉末分别置于坩埚中，在马弗炉中煅烧以去除水分和杂质；S2、将煅烧后的ZrO2、HfO2、CeO2、Y2O3、La2O3、Pr6O11粉末混合置于行星式球磨机中，球磨结束后，将浆料置于干燥箱中烘干得到成分均匀的高熵陶瓷粉体；S3、将高熵陶瓷粉体造粒后依次放入液压机和冷等静压机机中压制得到陶瓷生胚；S4、将陶瓷生坯置于气氛烧结炉中，获得(ZrHfCeYLaPr)O2‑δ高熵陶瓷块体，随后对(ZrHfCeYLaPr)O2‑δ高熵陶瓷块体进行机械加工后清洗烘干，得到具有萤石结构的高熵氧化物靶材。本发明采用上述结构的一种高熵萤石氧化物靶材及其制备方法，使用等摩尔比的氧化物粉末，制备出纯度以及致密度较高的六组分高熵氧化物靶材。
High-entropy fluorite oxide target material and preparation method thereof
一种高熵萤石氧化物靶材及其制备方法
MIAO YANG (author) / CHENG CHUFEI (author) / HOU JIADONG (author) / CHENG FUHAO (author) / WANG XIAOMIN (author)
2022-11-01
Patent
Electronic Resource
Chinese
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