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Ceramic microsphere coated nickel coating and preparation method thereof
The invention belongs to the technical field of aero-engine stealth materials, and relates to a ceramic microsphere electron beam physical gas phase coated nickel coating and a preparation method thereof, and the preparation method comprises the steps of ceramic microsphere selection, nickel target material preparation and nickel coating preparation. The nickel coating is prepared through the steps that a metallic nickel target material is loaded into a deposition chamber of electron beam physical vapor deposition equipment, the metallic nickel target material is evaporated, the molecular formula of the metallic nickel target material is Ni, and the purity of the metallic nickel target material is larger than 99.9%; selecting deposition process parameters: the vacuum degree lt of a deposition chamber; 5 * 10 <-4 > Torr; the beam intensity of the electron beam is 1.0-1.3 A; the temperature of the ceramic microspheres is 600-800 DEG C; the evaporation time is 10 to 30 minutes; and controlling the evaporation time of the target material, and finally obtaining the nickel coating on the surface of the ceramic microsphere. According to the method, the uniformity of the nickel coating layer can be improved, and the electromagnetic performance of the ceramic microspheres can be improved.
本发明属于涉及航空发动机隐身材料技术领域，涉及一种陶瓷微球电子束物理气相包覆镍涂层及制备方法，包括陶瓷微球选择、镍靶材制备和镍涂层制备的步骤；其镍涂层制备的步骤为：将金属镍靶材装入电子束物理气相沉积设备沉积室，蒸发金属镍靶材，金属镍靶材的分子式为Ni，纯度大于99.9％；选择沉积工艺参数：沉积室的真空度<5×10‑4Torr；电子束的束流强度1.0‑1.3A；陶瓷微球温度600‑800℃；蒸发时间10‑30min；控制靶材蒸发时间，最终在陶瓷微球表面获得镍涂层。本发明既能提升镍包覆层的均匀性，又能提高陶瓷微球的电磁性能。
Ceramic microsphere coated nickel coating and preparation method thereof
The invention belongs to the technical field of aero-engine stealth materials, and relates to a ceramic microsphere electron beam physical gas phase coated nickel coating and a preparation method thereof, and the preparation method comprises the steps of ceramic microsphere selection, nickel target material preparation and nickel coating preparation. The nickel coating is prepared through the steps that a metallic nickel target material is loaded into a deposition chamber of electron beam physical vapor deposition equipment, the metallic nickel target material is evaporated, the molecular formula of the metallic nickel target material is Ni, and the purity of the metallic nickel target material is larger than 99.9%; selecting deposition process parameters: the vacuum degree lt of a deposition chamber; 5 * 10 <-4 > Torr; the beam intensity of the electron beam is 1.0-1.3 A; the temperature of the ceramic microspheres is 600-800 DEG C; the evaporation time is 10 to 30 minutes; and controlling the evaporation time of the target material, and finally obtaining the nickel coating on the surface of the ceramic microsphere. According to the method, the uniformity of the nickel coating layer can be improved, and the electromagnetic performance of the ceramic microspheres can be improved.
本发明属于涉及航空发动机隐身材料技术领域，涉及一种陶瓷微球电子束物理气相包覆镍涂层及制备方法，包括陶瓷微球选择、镍靶材制备和镍涂层制备的步骤；其镍涂层制备的步骤为：将金属镍靶材装入电子束物理气相沉积设备沉积室，蒸发金属镍靶材，金属镍靶材的分子式为Ni，纯度大于99.9％；选择沉积工艺参数：沉积室的真空度<5×10‑4Torr；电子束的束流强度1.0‑1.3A；陶瓷微球温度600‑800℃；蒸发时间10‑30min；控制靶材蒸发时间，最终在陶瓷微球表面获得镍涂层。本发明既能提升镍包覆层的均匀性，又能提高陶瓷微球的电磁性能。
Ceramic microsphere coated nickel coating and preparation method thereof
一种陶瓷微球包覆镍涂层及其制备方法
LIU ZHENG (author) / SHEN ZAOYU (author) / LI YEHUA (author) / HE SHAN (author) / HE LIHUA (author)
2022-11-22
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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