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Ceramic substrate, AlN single crystal, AlN whisker, and AlN whisker composite
Provided is a ceramic substrate which can achieve a thermal conductivity equal to or greater than that of a conventional ceramic substrate in which a granular aluminum nitride polycrystal is contained in a matrix, and which can achieve superior breaking toughness than a conventional ceramic substrate in which a granular silicon nitride polycrystal is contained in a matrix. The ceramic substrate has characteristics which do not exist in existing ceramic substrates. A ceramic substrate according to an embodiment of the present invention is characterized in that a fibrous AlN single crystal is contained in a matrix.
本发明提供一种陶瓷基板，其能够实现与在基体中含有粒状的氮化铝多晶体的以往的陶瓷基板同等或同等以上的热导率，并且能够实现比在基体中含有粒状的氮化硅多晶体的以往的陶瓷基板优异的破坏韧度，具有现有陶瓷基板中不存在的特性。本实施方式的陶瓷基板的特征在于，在基体中含有纤维状的AlN单晶体。
Ceramic substrate, AlN single crystal, AlN whisker, and AlN whisker composite
Provided is a ceramic substrate which can achieve a thermal conductivity equal to or greater than that of a conventional ceramic substrate in which a granular aluminum nitride polycrystal is contained in a matrix, and which can achieve superior breaking toughness than a conventional ceramic substrate in which a granular silicon nitride polycrystal is contained in a matrix. The ceramic substrate has characteristics which do not exist in existing ceramic substrates. A ceramic substrate according to an embodiment of the present invention is characterized in that a fibrous AlN single crystal is contained in a matrix.
本发明提供一种陶瓷基板，其能够实现与在基体中含有粒状的氮化铝多晶体的以往的陶瓷基板同等或同等以上的热导率，并且能够实现比在基体中含有粒状的氮化硅多晶体的以往的陶瓷基板优异的破坏韧度，具有现有陶瓷基板中不存在的特性。本实施方式的陶瓷基板的特征在于，在基体中含有纤维状的AlN单晶体。
Ceramic substrate, AlN single crystal, AlN whisker, and AlN whisker composite
陶瓷基板、AlN单晶体、AlN晶须以及AlN晶须复合物
MATSUMOTO MASAKI (author) / WATANABE SHOTA (author) / NISHITANI KENJI (author) / MAEDA TAKAHIRO (author) / NAGAYA HITOSHI (author)
2023-01-31
Patent
Electronic Resource
Chinese
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