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Filter material for crucible, crucible and preparation method of filter material
The invention discloses a filtering material for a crucible, the crucible and a preparation method of the filtering material, the filtering material is a porous material, and the filtering material comprises the following components: rare earth metal oxide and metal carbide; wherein metal in the metal carbide is high-temperature-resistant metal; the mass percent of the rare earth metal oxide is between 1% and 5%, and the mass percent of the metal carbide is between 95% and 99%. By utilizing the filtering material, carbon particles in a growth atmosphere can be adsorbed in a crystal growth process, so that carbon inclusions in crystals are reduced, and the generation of microtube defects is effectively avoided. Besides, rare earth ions in the filtering material can be gradually released along with sublimation of the powder and reach the seed crystal along with the growth atmosphere, so that the polymorphic phenomenon of the crystal is effectively inhibited, the stability of the crystal form of the crystal is ensured, and the crystal quality is improved.
本披露公开了一种用于坩埚的过滤材料、坩埚及过滤材料制备方法,该过滤材料为多孔材料,其组分包括:稀土金属氧化物和金属碳化物;其中,金属碳化物中的金属为耐高温金属;稀土金属氧化物的质量百分比介于1%至5%之间,金属碳化物的质量百分比介于95%至99%之间。利用如上过滤材料,能够在晶体生长过程中吸附生长气氛中的碳颗粒,从而减少晶体中的碳包裹物,有效避免了微管缺陷的产生。另外,过滤材料中的稀土离子能够随着粉料的升华逐步释放并随着生长气氛到达籽晶处,从而有效抑制晶体出现多型现象,继而保证了晶体晶型的稳定性,提高了晶体质量。
Filter material for crucible, crucible and preparation method of filter material
The invention discloses a filtering material for a crucible, the crucible and a preparation method of the filtering material, the filtering material is a porous material, and the filtering material comprises the following components: rare earth metal oxide and metal carbide; wherein metal in the metal carbide is high-temperature-resistant metal; the mass percent of the rare earth metal oxide is between 1% and 5%, and the mass percent of the metal carbide is between 95% and 99%. By utilizing the filtering material, carbon particles in a growth atmosphere can be adsorbed in a crystal growth process, so that carbon inclusions in crystals are reduced, and the generation of microtube defects is effectively avoided. Besides, rare earth ions in the filtering material can be gradually released along with sublimation of the powder and reach the seed crystal along with the growth atmosphere, so that the polymorphic phenomenon of the crystal is effectively inhibited, the stability of the crystal form of the crystal is ensured, and the crystal quality is improved.
本披露公开了一种用于坩埚的过滤材料、坩埚及过滤材料制备方法,该过滤材料为多孔材料,其组分包括:稀土金属氧化物和金属碳化物;其中,金属碳化物中的金属为耐高温金属;稀土金属氧化物的质量百分比介于1%至5%之间,金属碳化物的质量百分比介于95%至99%之间。利用如上过滤材料,能够在晶体生长过程中吸附生长气氛中的碳颗粒,从而减少晶体中的碳包裹物,有效避免了微管缺陷的产生。另外,过滤材料中的稀土离子能够随着粉料的升华逐步释放并随着生长气氛到达籽晶处,从而有效抑制晶体出现多型现象,继而保证了晶体晶型的稳定性,提高了晶体质量。
Filter material for crucible, crucible and preparation method of filter material
用于坩埚的过滤材料、坩埚及过滤材料制备方法
CHEN ZEBIN (author) / ZHANG JIE (author)
2023-03-14
Patent
Electronic Resource
Chinese
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