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Preparation device and preparation method of silicon nitride powder
The invention provides a preparation device and a preparation method of silicon nitride powder. The preparation device comprises an ammonia gas supply unit, a silicon tetrachloride supply device, an organic solvent supply device, a reactor, a filtering, drying and washing all-in-one machine, a rotary furnace, a flash tank, a filter, a nitrogen supply unit and a reducing gas supply unit. By using the preparation device provided by the invention, the high-purity silicon nitride powder with high alpha phase proportion and high purity can be produced at low cost, and the silicon nitride powder is high in N content and low in O content and other impurity content.
本发明提供了一种氮化硅粉体的制备装置及制备方法。该制备装置包括氨气供应单元、四氯化硅供应装置、有机溶剂供应装置、反应器、过滤干燥洗涤一体机、旋转炉、闪蒸罐、过滤器、氮气供应单元和还原性气体供应单元。使用本发明提供的制备装置，能够低成本生产得到α相占比高、纯度高的高纯氮化硅粉体，其N含量高，O含量及其他杂质含量少。
Preparation device and preparation method of silicon nitride powder
The invention provides a preparation device and a preparation method of silicon nitride powder. The preparation device comprises an ammonia gas supply unit, a silicon tetrachloride supply device, an organic solvent supply device, a reactor, a filtering, drying and washing all-in-one machine, a rotary furnace, a flash tank, a filter, a nitrogen supply unit and a reducing gas supply unit. By using the preparation device provided by the invention, the high-purity silicon nitride powder with high alpha phase proportion and high purity can be produced at low cost, and the silicon nitride powder is high in N content and low in O content and other impurity content.
本发明提供了一种氮化硅粉体的制备装置及制备方法。该制备装置包括氨气供应单元、四氯化硅供应装置、有机溶剂供应装置、反应器、过滤干燥洗涤一体机、旋转炉、闪蒸罐、过滤器、氮气供应单元和还原性气体供应单元。使用本发明提供的制备装置，能够低成本生产得到α相占比高、纯度高的高纯氮化硅粉体，其N含量高，O含量及其他杂质含量少。
Preparation device and preparation method of silicon nitride powder
一种氮化硅粉体的制备装置及制备方法
ZENG XIAOGUO (author) / WAN YE (author) / YAN DAZHOU (author) / LI YUANXIAO (author) / LIU JIANHUA (author) / MA MINGKE (author) / WANG HAORUI (author) / DONG LUOYONG (author)
2023-03-21
Patent
Electronic Resource
Chinese
IPC:
B01J
Chemische oder physikalische Verfahren, z.B. Katalyse oder Kolloidchemie
,
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
/
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
F27B
Industrieöfen, Schachtöfen, Brennöfen, Retorten allgemein
,
FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL
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