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A platform for research: civil engineering, architecture and urbanism
Semiconductor plant micro-seismic resistance structure
The invention discloses a semiconductor plant micro-seismic resistance structure, and belongs to the field of building structures, the semiconductor plant micro-seismic resistance structure comprises a foundation layer and a structural frame arranged on the foundation layer, a supporting plate is arranged on the foundation layer, and a limiting block is arranged on the side wall, close to the foundation layer, of the supporting plate; limiting grooves used for being matched with the limiting blocks are formed in the foundation layer, a sandy soil layer is arranged between the supporting plate and the foundation layer, and a supporting assembly used for supporting equipment is arranged on the supporting plate. The device has the effect of reducing the influence of vibration in a plant on semiconductor production.
本申请公开了一种半导体厂房抗微震结构，属于建筑结构领域，其包括地基层以及设置于所述地基层上的结构架，所述地基层上设置有支撑板，所述支撑板靠近所述地基层的侧壁上设置有限位块，所述地基层上设置有用于与所述限位块配合的限位槽，所述支撑板与所述地基层之间设置有沙土层，所述支撑板上设置有用于支撑设备的支撑组件。本申请具有减少厂房内的震动对半导体生产造成影响的效果。
Semiconductor plant micro-seismic resistance structure
The invention discloses a semiconductor plant micro-seismic resistance structure, and belongs to the field of building structures, the semiconductor plant micro-seismic resistance structure comprises a foundation layer and a structural frame arranged on the foundation layer, a supporting plate is arranged on the foundation layer, and a limiting block is arranged on the side wall, close to the foundation layer, of the supporting plate; limiting grooves used for being matched with the limiting blocks are formed in the foundation layer, a sandy soil layer is arranged between the supporting plate and the foundation layer, and a supporting assembly used for supporting equipment is arranged on the supporting plate. The device has the effect of reducing the influence of vibration in a plant on semiconductor production.
本申请公开了一种半导体厂房抗微震结构，属于建筑结构领域，其包括地基层以及设置于所述地基层上的结构架，所述地基层上设置有支撑板，所述支撑板靠近所述地基层的侧壁上设置有限位块，所述地基层上设置有用于与所述限位块配合的限位槽，所述支撑板与所述地基层之间设置有沙土层，所述支撑板上设置有用于支撑设备的支撑组件。本申请具有减少厂房内的震动对半导体生产造成影响的效果。
Semiconductor plant micro-seismic resistance structure
一种半导体厂房抗微震结构
WANG XINHE (author)
2023-05-05
Patent
Electronic Resource
Chinese
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