A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Self-sealing door opening and closing structure for semiconductor technology
The invention belongs to the field of semiconductor processing equipment, and particularly relates to a semiconductor process self-sealing door opening and closing structure which comprises a fixed inner door frame, a movable outer door frame and an inner pressing plate, and the movable outer door frame is located on the outer side of the fixed inner door frame and is driven by a driving part to move up and down. The fixed inner door frame provided with the guide flange, the movable outer door frame provided with the inclined groove and the inner pressing plate provided with the guide shaft are arranged in a matched mode, under driving of the driving piece, the inclined groove can press the corresponding guide shaft, so that the inner pressing plate moves towards the inner side along the inclined face, and the rear side face of the inner pressing plate covers an opening of the fixed inner door frame from the front side; and self-sealing at the opening of the fixed inner door frame is realized. According to the invention, self-sealing at the opening of the fixed inner door frame can be effectively realized, aerial fog of harmful chemical liquid is prevented from overflowing when a semiconductor processing technology is carried out, the safety of operators is ensured, and meanwhile, the accuracy of a wafer process manufacturing procedure is also ensured.
本发明属于半导体加工设备领域，具体地说是一种半导体工艺自密封开关门结构，包括固定内门框、活动外门框及内压板，活动外门框位于固定内门框的外侧、并在驱动件驱动下进行上下移动。本发明通过设有导向凸缘的固定内门框、设有倾斜槽的活动外门框及设有导向轴的内压板的配合设置，并在驱动件的驱动下，倾斜槽可压动对应的导向轴，使内压板沿倾斜面向内侧移动，并使内压板的后侧面从前侧盖住固定内门框开口，实现固定内门框开口处的自密封。本发明可有效实现固定内门框开口处的自密封，防止进行半导体加工工艺时有害化学液的气雾的溢出，保证了操作人员的安全，同时也保证了晶圆工艺制程的工艺的精准性。
Self-sealing door opening and closing structure for semiconductor technology
The invention belongs to the field of semiconductor processing equipment, and particularly relates to a semiconductor process self-sealing door opening and closing structure which comprises a fixed inner door frame, a movable outer door frame and an inner pressing plate, and the movable outer door frame is located on the outer side of the fixed inner door frame and is driven by a driving part to move up and down. The fixed inner door frame provided with the guide flange, the movable outer door frame provided with the inclined groove and the inner pressing plate provided with the guide shaft are arranged in a matched mode, under driving of the driving piece, the inclined groove can press the corresponding guide shaft, so that the inner pressing plate moves towards the inner side along the inclined face, and the rear side face of the inner pressing plate covers an opening of the fixed inner door frame from the front side; and self-sealing at the opening of the fixed inner door frame is realized. According to the invention, self-sealing at the opening of the fixed inner door frame can be effectively realized, aerial fog of harmful chemical liquid is prevented from overflowing when a semiconductor processing technology is carried out, the safety of operators is ensured, and meanwhile, the accuracy of a wafer process manufacturing procedure is also ensured.
本发明属于半导体加工设备领域，具体地说是一种半导体工艺自密封开关门结构，包括固定内门框、活动外门框及内压板，活动外门框位于固定内门框的外侧、并在驱动件驱动下进行上下移动。本发明通过设有导向凸缘的固定内门框、设有倾斜槽的活动外门框及设有导向轴的内压板的配合设置，并在驱动件的驱动下，倾斜槽可压动对应的导向轴，使内压板沿倾斜面向内侧移动，并使内压板的后侧面从前侧盖住固定内门框开口，实现固定内门框开口处的自密封。本发明可有效实现固定内门框开口处的自密封，防止进行半导体加工工艺时有害化学液的气雾的溢出，保证了操作人员的安全，同时也保证了晶圆工艺制程的工艺的精准性。
Self-sealing door opening and closing structure for semiconductor technology
一种半导体工艺自密封开关门结构
DAI HONGFENG (author) / WANG YI (author) / CHEN CHAO (author)
2023-05-23
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
Automatic opening and closing sealing door and drying oven with sealing door
| European Patent Office | 2024
DOOR OPENING-CLOSING DEVICE AND DOOR OPENING-CLOSING METHOD
| European Patent Office | 2016