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Device for preparing ceramic powder
The device for preparing the ceramic powder comprises a reaction cavity; the plasma generation cavity is positioned at the top of the reaction cavity and is communicated with the reaction cavity; the crucible is positioned at the bottom in the reaction cavity and is used for bearing a reaction material; the high-frequency power supply is electrically connected with the plasma generation cavity, and the high-frequency power supply is used for generating plasma in the plasma generation cavity; the settling chamber is communicated with the reaction cavity; the collecting tank is positioned at the bottom of the settling chamber and is communicated with the settling chamber; the vacuum pump is communicated with the settling chamber and is used for keeping the reaction cavity in a vacuum state. The aluminum nitride nanoparticles prepared by the device are small in granularity and high in purity, and can meet the raw material requirements of high-requirement devices.
一种制备陶瓷粉末的装置，包括：反应腔；位于反应腔顶部的等离子体发生腔，所述等离子体发生腔与反应腔相连通；位于反应腔内底部的坩埚，所述坩埚用于承载反应物料；高频电源，所述高频电源与等离子体发生腔电连接，所述高频电源用于在等离子体发生腔内生成等离子体；与反应腔相连通的沉降室；位于沉降室底部的收集罐，所述收集罐与沉降室相连通；与沉降室相连通的真空泵，所述真空泵用于使反应腔保持真空状态。所述装置制备的氮化铝纳米颗粒粒度小、纯度高，能够满足高要求器件的原材料需要。
Device for preparing ceramic powder
The device for preparing the ceramic powder comprises a reaction cavity; the plasma generation cavity is positioned at the top of the reaction cavity and is communicated with the reaction cavity; the crucible is positioned at the bottom in the reaction cavity and is used for bearing a reaction material; the high-frequency power supply is electrically connected with the plasma generation cavity, and the high-frequency power supply is used for generating plasma in the plasma generation cavity; the settling chamber is communicated with the reaction cavity; the collecting tank is positioned at the bottom of the settling chamber and is communicated with the settling chamber; the vacuum pump is communicated with the settling chamber and is used for keeping the reaction cavity in a vacuum state. The aluminum nitride nanoparticles prepared by the device are small in granularity and high in purity, and can meet the raw material requirements of high-requirement devices.
一种制备陶瓷粉末的装置，包括：反应腔；位于反应腔顶部的等离子体发生腔，所述等离子体发生腔与反应腔相连通；位于反应腔内底部的坩埚，所述坩埚用于承载反应物料；高频电源，所述高频电源与等离子体发生腔电连接，所述高频电源用于在等离子体发生腔内生成等离子体；与反应腔相连通的沉降室；位于沉降室底部的收集罐，所述收集罐与沉降室相连通；与沉降室相连通的真空泵，所述真空泵用于使反应腔保持真空状态。所述装置制备的氮化铝纳米颗粒粒度小、纯度高，能够满足高要求器件的原材料需要。
Device for preparing ceramic powder
一种制备陶瓷粉末的装置
HAN GANG (author) / GUO RUOBING (author) / QI YANLING (author) / CHENG XINGDE (author) / HAN QIHANG (author)
2023-06-02
Patent
Electronic Resource
Chinese
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