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The invention discloses a forming preparation process of an aluminum nitride ceramic thick substrate. The method comprises the following steps: cutting an aluminum nitride tape casting blank sheet prepared by tape casting of a non-water-based system to obtain a unit blank sheet; the surfaces of the unit blank pieces are coated with a layer of slurry in a silk-screen printing mode, and the slurry is prepared from aluminum nitride powder, a sintering aid, a dispersing agent, a binding agent and a solvent according to the proportion; a plurality of unit blank sheets are stacked up and down and placed in a hot pressing furnace; the hot pressing furnace applies axial pressure to the unit blank pieces under the heating condition, the unit blank pieces are subjected to hot pressing bonding, and the aluminum nitride ceramic thick substrate is obtained. According to the method, the surfaces of the unit blank sheets are coated with a layer of slurry with similar components, and when the multiple layers of unit blank sheets are subjected to lamination hot-pressing treatment, the multiple layers of unit blank sheets are fully bonded together to obtain the thick substrate, so that the mechanical property of the substrate is improved, and in the drying process, the problems of cracking, deformation, peeling and the like caused by too small thickness of the substrate are solved; and the quality of the aluminum nitride ceramic thick substrate is improved.
本发明公开了一种氮化铝陶瓷厚基板的成型制备工艺。将通过非水基体系流延成型制备得到的氮化铝流延坯片进行裁剪,得到单元坯片;在单元坯片表面通过丝网印刷的方式涂覆一层浆料,浆料采用氮化铝粉、烧结助剂、分散剂、粘结剂和溶剂按照比例配置而成;将多个单元坯片上下叠层摆放至热压炉中;热压炉在加热条件下对单元坯片施加轴向压力,将多个单元坯片热压粘合,得到氮化铝陶瓷厚基板。本发明通过在单元坯片表面涂覆一层组分相近的浆料,在对多层单元坯片叠层热压处理时,多层单元坯片充分粘结在一起得到厚基板,提高了基板力学性能,在干燥过程中,不会因为基板厚度太薄而产生开裂、变形、起皮等问题,提高了氮化铝陶瓷厚基板的质量。
The invention discloses a forming preparation process of an aluminum nitride ceramic thick substrate. The method comprises the following steps: cutting an aluminum nitride tape casting blank sheet prepared by tape casting of a non-water-based system to obtain a unit blank sheet; the surfaces of the unit blank pieces are coated with a layer of slurry in a silk-screen printing mode, and the slurry is prepared from aluminum nitride powder, a sintering aid, a dispersing agent, a binding agent and a solvent according to the proportion; a plurality of unit blank sheets are stacked up and down and placed in a hot pressing furnace; the hot pressing furnace applies axial pressure to the unit blank pieces under the heating condition, the unit blank pieces are subjected to hot pressing bonding, and the aluminum nitride ceramic thick substrate is obtained. According to the method, the surfaces of the unit blank sheets are coated with a layer of slurry with similar components, and when the multiple layers of unit blank sheets are subjected to lamination hot-pressing treatment, the multiple layers of unit blank sheets are fully bonded together to obtain the thick substrate, so that the mechanical property of the substrate is improved, and in the drying process, the problems of cracking, deformation, peeling and the like caused by too small thickness of the substrate are solved; and the quality of the aluminum nitride ceramic thick substrate is improved.
本发明公开了一种氮化铝陶瓷厚基板的成型制备工艺。将通过非水基体系流延成型制备得到的氮化铝流延坯片进行裁剪,得到单元坯片;在单元坯片表面通过丝网印刷的方式涂覆一层浆料,浆料采用氮化铝粉、烧结助剂、分散剂、粘结剂和溶剂按照比例配置而成;将多个单元坯片上下叠层摆放至热压炉中;热压炉在加热条件下对单元坯片施加轴向压力,将多个单元坯片热压粘合,得到氮化铝陶瓷厚基板。本发明通过在单元坯片表面涂覆一层组分相近的浆料,在对多层单元坯片叠层热压处理时,多层单元坯片充分粘结在一起得到厚基板,提高了基板力学性能,在干燥过程中,不会因为基板厚度太薄而产生开裂、变形、起皮等问题,提高了氮化铝陶瓷厚基板的质量。
Forming preparation process of aluminum nitride ceramic thick substrate
一种氮化铝陶瓷厚基板的成型制备工艺
2023-06-13
Patent
Electronic Resource
Chinese
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