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Alumina composite substrate material and preparation method thereof
The invention provides an aluminum oxide composite substrate material. The aluminum oxide composite substrate material comprises a base layer, an anti-fracture layer and a protective layer, wherein the base layer is prepared by mixing and sintering the following raw materials: 50-80 parts by weight of aluminum oxide, 5-8 parts by weight of zirconium oxide, 15-24 parts by weight of silicon carbide, 2.5-4 parts by weight of a sintering agent, 1-1.6 parts by weight of a stabilizer, 6-9.6 parts by weight of a sintering aid and 122-150 parts by weight of water; the anti-fracture layer is laid on the surface of the base layer, so that the anti-fracture performance of the base layer is improved; the protective layer is smeared on the outer surface of the anti-fracture layer and used for preventing the anti-fracture layer from being oxidized. The invention further provides a method for manufacturing the aluminum oxide composite substrate, the toughness of the aluminum oxide composite substrate in the prior art is improved by utilizing the chemical characteristics of zirconium oxide and silicon carbide, and the fracture resistance of the aluminum oxide composite substrate is improved by additionally arranging the fracture resistance layer on the basis of the base layer.
本发明提供了一种氧化铝复合基板材料,包括:基础层、抗断裂层、保护层;其中,基础层由以下原料混合烧结制成:氧化铝50‑80重量份、氧化锆5‑8重量份、碳化硅15‑24重量份、烧结剂2.5‑4重量份、稳定剂1‑1.6重量份、助烧剂6‑9.6重量份、水122‑150重量份;抗断裂层铺设于基础层的表面,提高基础层的抗断裂性能;保护层涂抹于抗断裂层的外表面,用于防止抗断裂层的氧化。本发明还提供制造该氧化铝复合基板的方法,通过本发明,利用氧化锆和碳化硅的化学特性改善现有技术中氧化铝复合基板的韧性,并在基础层的基础上增设抗断裂层,以提高氧化铝复合基板的抗断裂性能。
Alumina composite substrate material and preparation method thereof
The invention provides an aluminum oxide composite substrate material. The aluminum oxide composite substrate material comprises a base layer, an anti-fracture layer and a protective layer, wherein the base layer is prepared by mixing and sintering the following raw materials: 50-80 parts by weight of aluminum oxide, 5-8 parts by weight of zirconium oxide, 15-24 parts by weight of silicon carbide, 2.5-4 parts by weight of a sintering agent, 1-1.6 parts by weight of a stabilizer, 6-9.6 parts by weight of a sintering aid and 122-150 parts by weight of water; the anti-fracture layer is laid on the surface of the base layer, so that the anti-fracture performance of the base layer is improved; the protective layer is smeared on the outer surface of the anti-fracture layer and used for preventing the anti-fracture layer from being oxidized. The invention further provides a method for manufacturing the aluminum oxide composite substrate, the toughness of the aluminum oxide composite substrate in the prior art is improved by utilizing the chemical characteristics of zirconium oxide and silicon carbide, and the fracture resistance of the aluminum oxide composite substrate is improved by additionally arranging the fracture resistance layer on the basis of the base layer.
本发明提供了一种氧化铝复合基板材料,包括:基础层、抗断裂层、保护层;其中,基础层由以下原料混合烧结制成:氧化铝50‑80重量份、氧化锆5‑8重量份、碳化硅15‑24重量份、烧结剂2.5‑4重量份、稳定剂1‑1.6重量份、助烧剂6‑9.6重量份、水122‑150重量份;抗断裂层铺设于基础层的表面,提高基础层的抗断裂性能;保护层涂抹于抗断裂层的外表面,用于防止抗断裂层的氧化。本发明还提供制造该氧化铝复合基板的方法,通过本发明,利用氧化锆和碳化硅的化学特性改善现有技术中氧化铝复合基板的韧性,并在基础层的基础上增设抗断裂层,以提高氧化铝复合基板的抗断裂性能。
Alumina composite substrate material and preparation method thereof
一种氧化铝复合基板材料及其制备方法
MA XISONG (author) / ZHU CHAOYANG (author)
2023-09-08
Patent
Electronic Resource
Chinese
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