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Preparation method of large-size magnesium oxide target material
The invention provides a preparation method of a large-size magnesium oxide target material, which comprises the following steps: carrying out ball milling on a magnesium oxide raw material, carrying out hot isostatic pressing molding and hot pressed sintering processes, and then carrying out annealing treatment to obtain the large-size magnesium oxide target material. According to the preparation method, hot isostatic pressing and hot pressing sintering processes are combined, the large-size magnesium oxide target with the diameter larger than or equal to 420 mm and the thickness larger than or equal to 10 mm can be prepared, the problem that the preparation quality is limited due to the large size of the magnesium oxide target is solved, the prepared target is high in purity and density, the density can reach 97% or above, especially 99.9%, and cracks are few.
本发明提供了一种大尺寸氧化镁靶材的制备方法，所述制备方法包括如下步骤：将氧化镁原料进行球磨后，进行热等静压成型和热压烧结工艺，然后进行退火处理，得到大尺寸氧化镁靶材。本发明提供的制备方法将热等静压和热压烧结工艺结合，可以制备直径≥420mm，厚度≥10mm的大尺寸氧化镁靶材，解决了氧化镁靶材尺寸大对制备质量的限制，制备的靶材纯度高、致密度高，致密度达到97％以上，尤其可以达到99.9％，裂纹少。
Preparation method of large-size magnesium oxide target material
The invention provides a preparation method of a large-size magnesium oxide target material, which comprises the following steps: carrying out ball milling on a magnesium oxide raw material, carrying out hot isostatic pressing molding and hot pressed sintering processes, and then carrying out annealing treatment to obtain the large-size magnesium oxide target material. According to the preparation method, hot isostatic pressing and hot pressing sintering processes are combined, the large-size magnesium oxide target with the diameter larger than or equal to 420 mm and the thickness larger than or equal to 10 mm can be prepared, the problem that the preparation quality is limited due to the large size of the magnesium oxide target is solved, the prepared target is high in purity and density, the density can reach 97% or above, especially 99.9%, and cracks are few.
本发明提供了一种大尺寸氧化镁靶材的制备方法，所述制备方法包括如下步骤：将氧化镁原料进行球磨后，进行热等静压成型和热压烧结工艺，然后进行退火处理，得到大尺寸氧化镁靶材。本发明提供的制备方法将热等静压和热压烧结工艺结合，可以制备直径≥420mm，厚度≥10mm的大尺寸氧化镁靶材，解决了氧化镁靶材尺寸大对制备质量的限制，制备的靶材纯度高、致密度高，致密度达到97％以上，尤其可以达到99.9％，裂纹少。
Preparation method of large-size magnesium oxide target material
一种大尺寸氧化镁靶材的制备方法
YAO LIJUN (author) / PAN JIE (author) / ZHOU YOUPING (author) / HUANG DONGCHANG (author) / YIN BO (author)
2023-10-20
Patent
Electronic Resource
Chinese
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