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High-entropy ceramic target material for vacuum coating and preparation method thereof
The invention discloses a high-entropy ceramic target material for vacuum coating and a preparation method of the high-entropy ceramic target material. The high-entropy ceramic target material is prepared from the following components in parts by molar weight: 1 part of Al2O3, 0.5-1 part of Cr2O3, 0.1-0.3 part of SiO2, 0.1-0.3 part of TiO2, 0.1 part of Y2O3 and 0.03-0.2 part of Ni. The prepared ceramic target material is high in compactness, high in bending strength, simple in preparation process and worthy of popularization.
本发明公开了一种真空镀膜用高熵陶瓷靶材及其制备方法，其由以下组分按照摩尔量份数制备而成：Al2O3 1份、Cr2O3 0.5‑1份、SiO2 0.1‑0.3份、TiO2 0.1‑0.3份、Y2O3 0.1份、Ni 0.03‑0.2份。本发明制备的陶瓷靶材致密性高，抗弯强度大，制备工艺简单，值得推广。
High-entropy ceramic target material for vacuum coating and preparation method thereof
The invention discloses a high-entropy ceramic target material for vacuum coating and a preparation method of the high-entropy ceramic target material. The high-entropy ceramic target material is prepared from the following components in parts by molar weight: 1 part of Al2O3, 0.5-1 part of Cr2O3, 0.1-0.3 part of SiO2, 0.1-0.3 part of TiO2, 0.1 part of Y2O3 and 0.03-0.2 part of Ni. The prepared ceramic target material is high in compactness, high in bending strength, simple in preparation process and worthy of popularization.
本发明公开了一种真空镀膜用高熵陶瓷靶材及其制备方法，其由以下组分按照摩尔量份数制备而成：Al2O3 1份、Cr2O3 0.5‑1份、SiO2 0.1‑0.3份、TiO2 0.1‑0.3份、Y2O3 0.1份、Ni 0.03‑0.2份。本发明制备的陶瓷靶材致密性高，抗弯强度大，制备工艺简单，值得推广。
High-entropy ceramic target material for vacuum coating and preparation method thereof
一种真空镀膜用高熵陶瓷靶材及其制备方法
YANG JUNFENG (author) / ZHANG LINCHAO (author) / XIE ZHUOMING (author) / LIU RUI (author) / YANG RUIFANG (author)
2023-11-21
Patent
Electronic Resource
Chinese
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