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Door opening mechanism of semiconductor process equipment
The invention provides a semiconductor process equipment door opening mechanism which comprises a driving piece, a rotating piece, a supporting connecting piece, a damping buffer piece and a position detection structure, and the driving piece provides operation power to drive the rotating piece to conduct circumferential reciprocating rotation so as to adjust the opening and closing state of a door plate; rigid collision can be reduced through the damping buffer piece corresponding to the rotating piece, noise is lowered, meanwhile, the stability of the machine table is improved, and the service life of the machine table is prolonged; through the arrangement of the position detection structure, the opening and closing state of the door plate can be fed back in time, and the wafer transmission safety is guaranteed; furthermore, through the arrangement of an adjusting limiting block, the opening and closing angle of the door plate can be adjusted, and the applicability is improved; the driving part can be suitable for single-door or double-door semiconductor process equipment, the stretching direction of the driving part can be transverse or vertical, and the application range is wide.
本发明提供一种半导体工艺设备开门机构，包括驱动件、旋转件、支撑连接件、阻尼缓冲件及位置检测结构，通过驱动件提供运行动力，带动旋转件进行周向往复转动以调节门板的开关状态；通过与旋转件对应设置的阻尼缓冲件可减少刚性碰撞，降低噪音，同时提高机台稳定性，增加机台寿命；通过位置检测结构的设置，可及时反馈门板的开关状态，保障晶圆传输的安全性；进一步的，通过调节限位块的设置，可对门板的开合角度进行调整，提高适用性；可适用于单门或双门半导体工艺设备，且驱动件的伸缩方向可包括沿横向或沿竖向伸缩，适用范围广。
Door opening mechanism of semiconductor process equipment
The invention provides a semiconductor process equipment door opening mechanism which comprises a driving piece, a rotating piece, a supporting connecting piece, a damping buffer piece and a position detection structure, and the driving piece provides operation power to drive the rotating piece to conduct circumferential reciprocating rotation so as to adjust the opening and closing state of a door plate; rigid collision can be reduced through the damping buffer piece corresponding to the rotating piece, noise is lowered, meanwhile, the stability of the machine table is improved, and the service life of the machine table is prolonged; through the arrangement of the position detection structure, the opening and closing state of the door plate can be fed back in time, and the wafer transmission safety is guaranteed; furthermore, through the arrangement of an adjusting limiting block, the opening and closing angle of the door plate can be adjusted, and the applicability is improved; the driving part can be suitable for single-door or double-door semiconductor process equipment, the stretching direction of the driving part can be transverse or vertical, and the application range is wide.
本发明提供一种半导体工艺设备开门机构，包括驱动件、旋转件、支撑连接件、阻尼缓冲件及位置检测结构，通过驱动件提供运行动力，带动旋转件进行周向往复转动以调节门板的开关状态；通过与旋转件对应设置的阻尼缓冲件可减少刚性碰撞，降低噪音，同时提高机台稳定性，增加机台寿命；通过位置检测结构的设置，可及时反馈门板的开关状态，保障晶圆传输的安全性；进一步的，通过调节限位块的设置，可对门板的开合角度进行调整，提高适用性；可适用于单门或双门半导体工艺设备，且驱动件的伸缩方向可包括沿横向或沿竖向伸缩，适用范围广。
Door opening mechanism of semiconductor process equipment
半导体工艺设备开门机构
SHI HAILIN (author) / LIU ERZHUANG (author)
2023-12-29
Patent
Electronic Resource
Chinese