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Carbon/carbon composite material, preparation method thereof and carbon/carbon PECVD (Plasma Enhanced Chemical Vapor Deposition) bearing frame
The invention relates to the technical field of composite materials, and provides a carbon/carbon composite material, a preparation method thereof and a carbon/carbon PECVD (Plasma Enhanced Chemical Vapor Deposition) bearing frame. The preparation method comprises the following steps: mixing liquid resin and carbon material powder to obtain carbon-containing resin liquid; impregnating the carbon cloth in the carbon-containing resin liquid to obtain a prepreg; laying the prepreg, performing mold pressing treatment, carbonizing the obtained plate blank, impregnating the carbonized plate in asphalt, and carbonizing the impregnated carbonized plate again to obtain a carbon/carbon plate; and graphitizing the carbon/carbon plate to obtain the carbon/carbon composite material. And carrying out fine machining on the carbon-carbon composite material to obtain the carbon/carbon PECVD bearing frame. The carbon/carbon PECVD bearing frame provided by the invention has the advantages of low density, high strength, designable size and the like, can adapt to a complicated PECVD process environment, is not easy to damage, has excellent mechanical properties, low replacement frequency and long service cycle, and can effectively reduce the cost of a PECVD process.
本发明涉及复合材料技术领域,提供了一种碳/碳复合材料及其制备方法以及一种碳/碳PECVD承载框。本发明将液体树脂和碳材料粉末混合,得到含碳树脂液;将碳布在含碳树脂液中浸渍,得到预浸料;将预浸料铺层后进行模压处理,再将所得板坯碳化,之后将碳化板材在沥青中浸渍,浸渍后的碳化板材再次碳化,得到碳/碳板材;碳/碳板材石墨化处理后得到碳/碳复合材料。将碳碳复合材料进行精细机加工即可得到碳/碳PECVD承载框。本发明提供的碳/碳PECVD承载框具有密度低,强度高,尺寸可设计等优点,能够适应PECVD复杂的工艺环境,不易受到破坏,力学性能优异,更换频率低,使用周期长,能够有效降低PECVD工艺的成本。
Carbon/carbon composite material, preparation method thereof and carbon/carbon PECVD (Plasma Enhanced Chemical Vapor Deposition) bearing frame
The invention relates to the technical field of composite materials, and provides a carbon/carbon composite material, a preparation method thereof and a carbon/carbon PECVD (Plasma Enhanced Chemical Vapor Deposition) bearing frame. The preparation method comprises the following steps: mixing liquid resin and carbon material powder to obtain carbon-containing resin liquid; impregnating the carbon cloth in the carbon-containing resin liquid to obtain a prepreg; laying the prepreg, performing mold pressing treatment, carbonizing the obtained plate blank, impregnating the carbonized plate in asphalt, and carbonizing the impregnated carbonized plate again to obtain a carbon/carbon plate; and graphitizing the carbon/carbon plate to obtain the carbon/carbon composite material. And carrying out fine machining on the carbon-carbon composite material to obtain the carbon/carbon PECVD bearing frame. The carbon/carbon PECVD bearing frame provided by the invention has the advantages of low density, high strength, designable size and the like, can adapt to a complicated PECVD process environment, is not easy to damage, has excellent mechanical properties, low replacement frequency and long service cycle, and can effectively reduce the cost of a PECVD process.
本发明涉及复合材料技术领域,提供了一种碳/碳复合材料及其制备方法以及一种碳/碳PECVD承载框。本发明将液体树脂和碳材料粉末混合,得到含碳树脂液;将碳布在含碳树脂液中浸渍,得到预浸料;将预浸料铺层后进行模压处理,再将所得板坯碳化,之后将碳化板材在沥青中浸渍,浸渍后的碳化板材再次碳化,得到碳/碳板材;碳/碳板材石墨化处理后得到碳/碳复合材料。将碳碳复合材料进行精细机加工即可得到碳/碳PECVD承载框。本发明提供的碳/碳PECVD承载框具有密度低,强度高,尺寸可设计等优点,能够适应PECVD复杂的工艺环境,不易受到破坏,力学性能优异,更换频率低,使用周期长,能够有效降低PECVD工艺的成本。
Carbon/carbon composite material, preparation method thereof and carbon/carbon PECVD (Plasma Enhanced Chemical Vapor Deposition) bearing frame
一种碳/碳复合材料及其制备方法以及一种碳/碳PECVD承载框
ZHAO QIANG (author) / JIA LINTAO (author) / SUN ZHULIN (author) / JIANG JIE (author) / TAN GONGFENG (author) / WEI QINGZHEN (author) / YOO WOONG-JUN (author)
2024-01-05
Patent
Electronic Resource
Chinese
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