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Pyroelectric ceramic material, pyroelectric thick film sensor and preparation method and application of pyroelectric thick film sensor
The invention discloses a pyroelectric ceramic material, a pyroelectric thick film sensor and a preparation method and application thereof. The pyroelectric ceramic material is formed by sintering Pb3O4, ZrO2, TiO2, Na2CO3 and an oxide/carbonate of M, wherein M in the oxide/carbonate of M is at least one of Fe, Mn and Nb. The pyroelectric ceramic material disclosed by the invention has the advantages of low sintering temperature, low dielectric loss, small dielectric constant, high density and the like while maintaining excellent pyroelectric characteristics, is formed by stacking through a multi-time sintering process, and is used as a pyroelectric detection sensitive element for a pyroelectric thick film sensor, the selection of a lower electrode material is relatively wide, and the application range of the pyroelectric detection sensitive element is wide. The preparation cost of the pyroelectric thick film sensor is indirectly reduced, and the pyroelectric thick film sensor has a wide application prospect in instruments such as infrared detectors and infrared imagers.
本发明公开了热释电陶瓷材料、热释电厚膜传感器及其制备方法和应用。本发明的热释电陶瓷材料由Pb3O4、ZrO2、TiO2、Na2CO3和M的氧化物/碳酸盐烧结而成，M的氧化物/碳酸盐中的M为Fe、Mn、Nb中的至少一种。本发明的热释电陶瓷材料在保持优秀的热释电特性的同时还具有烧结温度低、介电损耗低、介电常数小、致密度高等优点，其通过多次烧结工艺堆叠而成，将其作为热释电探测灵敏元用于热释电厚膜传感器，下电极材料的选择相对较为宽泛，间接降低了热释电厚膜传感器的制备成本，在红外探测器、红外成像仪等仪器中具有广阔的应用前景。
Pyroelectric ceramic material, pyroelectric thick film sensor and preparation method and application of pyroelectric thick film sensor
The invention discloses a pyroelectric ceramic material, a pyroelectric thick film sensor and a preparation method and application thereof. The pyroelectric ceramic material is formed by sintering Pb3O4, ZrO2, TiO2, Na2CO3 and an oxide/carbonate of M, wherein M in the oxide/carbonate of M is at least one of Fe, Mn and Nb. The pyroelectric ceramic material disclosed by the invention has the advantages of low sintering temperature, low dielectric loss, small dielectric constant, high density and the like while maintaining excellent pyroelectric characteristics, is formed by stacking through a multi-time sintering process, and is used as a pyroelectric detection sensitive element for a pyroelectric thick film sensor, the selection of a lower electrode material is relatively wide, and the application range of the pyroelectric detection sensitive element is wide. The preparation cost of the pyroelectric thick film sensor is indirectly reduced, and the pyroelectric thick film sensor has a wide application prospect in instruments such as infrared detectors and infrared imagers.
本发明公开了热释电陶瓷材料、热释电厚膜传感器及其制备方法和应用。本发明的热释电陶瓷材料由Pb3O4、ZrO2、TiO2、Na2CO3和M的氧化物/碳酸盐烧结而成，M的氧化物/碳酸盐中的M为Fe、Mn、Nb中的至少一种。本发明的热释电陶瓷材料在保持优秀的热释电特性的同时还具有烧结温度低、介电损耗低、介电常数小、致密度高等优点，其通过多次烧结工艺堆叠而成，将其作为热释电探测灵敏元用于热释电厚膜传感器，下电极材料的选择相对较为宽泛，间接降低了热释电厚膜传感器的制备成本，在红外探测器、红外成像仪等仪器中具有广阔的应用前景。
Pyroelectric ceramic material, pyroelectric thick film sensor and preparation method and application of pyroelectric thick film sensor
热释电陶瓷材料、热释电厚膜传感器及其制备方法和应用
LI YI (author) / WANG AOBO (author) / CHENG JIANHUA (author) / HU XING (author) / LING ZHIYUAN (author)
2024-01-12
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
G01J
Messen der Intensität, der Geschwindigkeit, der spektralen Zusammensetzung, der Polarisation, der Phase oder der Pulscharakteristik von infrarotem, sichtbarem oder ultraviolettem Licht
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