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Rare earth oxyfluoride ceramic for physical vapor deposition material source and preparation method of rare earth oxyfluoride ceramic
The invention belongs to the field of rare earth oxyfluoride materials, and particularly relates to rare earth oxyfluoride ceramic for a physical vapor deposition material source and a preparation method of the rare earth oxyfluoride ceramic. Mixing, ball-milling, drying and sieving the raw material powder according to a certain ratio to form uniformly mixed powder; and pressing into a ceramic green body, and roasting at 400-800 DEG C to obtain the rare earth oxyfluoride ceramic. According to the method, the raw material powder is refined to the nanoscale in advance, so that the consistency of the granularity of the raw material powder is ensured, and therefore, in the subsequent solid-phase reaction process, the miniaturization and homogenization of the rare earth oxyfluoride powder can be realized, and the low-temperature synthesis of the rare earth oxyfluoride can be realized; the synthesized rare earth oxyfluoride powder has the advantages of being high in crystallinity, small in grain size and good in uniformity, can be directly used in the pressing process of the physical vapor deposition target material, does not need to be subjected to ball milling and smashing, and effectively avoids introduction of pollutants.
本发明属于稀土氟氧化物材料领域，具体涉及一种物理气相沉积材料源用稀土氟氧化物陶瓷及其制备方法，包括如下步骤：将稀土氧化物、稀土氟化物原料粉体预处理至纳米级；将原料粉体按照一定配比混合球磨、干燥、过筛形成混合均匀粉体；再压制成陶瓷坯体，于400～800℃焙烧制得稀土氟氧化物陶瓷。本发明采用预先将原料粉体细化至纳米级保证了原料粉体粒度的一致性，从而在后续固相反应过程中，能够实现稀土氟氧化物粉体的细小化和均一化，并实现稀土氟氧化物的低温合成，合成的稀土氟氧化物粉体具有结晶度高、晶粒尺寸小且均匀性好的优势，可直接用于物理气相沉积靶材的压制过程，无需再进行球磨粉碎，有效避免污染物的引入。
Rare earth oxyfluoride ceramic for physical vapor deposition material source and preparation method of rare earth oxyfluoride ceramic
The invention belongs to the field of rare earth oxyfluoride materials, and particularly relates to rare earth oxyfluoride ceramic for a physical vapor deposition material source and a preparation method of the rare earth oxyfluoride ceramic. Mixing, ball-milling, drying and sieving the raw material powder according to a certain ratio to form uniformly mixed powder; and pressing into a ceramic green body, and roasting at 400-800 DEG C to obtain the rare earth oxyfluoride ceramic. According to the method, the raw material powder is refined to the nanoscale in advance, so that the consistency of the granularity of the raw material powder is ensured, and therefore, in the subsequent solid-phase reaction process, the miniaturization and homogenization of the rare earth oxyfluoride powder can be realized, and the low-temperature synthesis of the rare earth oxyfluoride can be realized; the synthesized rare earth oxyfluoride powder has the advantages of being high in crystallinity, small in grain size and good in uniformity, can be directly used in the pressing process of the physical vapor deposition target material, does not need to be subjected to ball milling and smashing, and effectively avoids introduction of pollutants.
本发明属于稀土氟氧化物材料领域，具体涉及一种物理气相沉积材料源用稀土氟氧化物陶瓷及其制备方法，包括如下步骤：将稀土氧化物、稀土氟化物原料粉体预处理至纳米级；将原料粉体按照一定配比混合球磨、干燥、过筛形成混合均匀粉体；再压制成陶瓷坯体，于400～800℃焙烧制得稀土氟氧化物陶瓷。本发明采用预先将原料粉体细化至纳米级保证了原料粉体粒度的一致性，从而在后续固相反应过程中，能够实现稀土氟氧化物粉体的细小化和均一化，并实现稀土氟氧化物的低温合成，合成的稀土氟氧化物粉体具有结晶度高、晶粒尺寸小且均匀性好的优势，可直接用于物理气相沉积靶材的压制过程，无需再进行球磨粉碎，有效避免污染物的引入。
Rare earth oxyfluoride ceramic for physical vapor deposition material source and preparation method of rare earth oxyfluoride ceramic
一种物理气相沉积材料源用稀土氟氧化物陶瓷及其制备方法
WANG XUANLI (author) / WANG XIAONA (author) / SONG XIWEN (author)
2024-03-08
Patent
Electronic Resource
Chinese
| Wiley | 2024
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