A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
This sample holding tool (10) is provided with an aluminum nitride substrate (1) and an internal electrode (2) provided on the aluminum nitride substrate (1). The aluminum nitride substrate (1) has a plurality of aluminum nitride particles (11) and aluminum oxynitride particles (12) located at grain boundaries between the aluminum nitride particles (11). Titanium (13) is in solid solution in the aluminum oxynitride particles (12).
本发明的试样保持工具(10)具备：氮化铝基体(1)和设于该氮化铝基体(1)的内部电极(2)。所述氮化铝基体(1)具有：多个氮化铝粒子(11)、以及位于该氮化铝粒子(11)之间的晶界的氧氮化铝粒子(12)。所述氧氮化铝粒子(12)中固溶有钛(13)。
This sample holding tool (10) is provided with an aluminum nitride substrate (1) and an internal electrode (2) provided on the aluminum nitride substrate (1). The aluminum nitride substrate (1) has a plurality of aluminum nitride particles (11) and aluminum oxynitride particles (12) located at grain boundaries between the aluminum nitride particles (11). Titanium (13) is in solid solution in the aluminum oxynitride particles (12).
本发明的试样保持工具(10)具备：氮化铝基体(1)和设于该氮化铝基体(1)的内部电极(2)。所述氮化铝基体(1)具有：多个氮化铝粒子(11)、以及位于该氮化铝粒子(11)之间的晶界的氧氮化铝粒子(12)。所述氧氮化铝粒子(12)中固溶有钛(13)。
Sample holding tool
试样保持工具
NARASAKI YOSHIGO (author)
2024-03-22
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME