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A standard type grating floor comprises a top plate and a rib structure, the rib structure and the top plate are made of aluminum alloy to be integrally formed and cast, a plurality of penetrating holes are formed in the top plate so that the ventilation quantity can reach 50% or above, and therefore the requirement for the cleanliness of a semiconductor technology can be met.
一种标准型格栅地板,包含有天板及肋骨结构,以令该肋骨结构与该天板采用铝合金一体成型铸造,其中,该天板上形成有多个贯穿的穿孔,以形成50%以上的通风量,故能满足半导体工艺清净度的需求。
A standard type grating floor comprises a top plate and a rib structure, the rib structure and the top plate are made of aluminum alloy to be integrally formed and cast, a plurality of penetrating holes are formed in the top plate so that the ventilation quantity can reach 50% or above, and therefore the requirement for the cleanliness of a semiconductor technology can be met.
一种标准型格栅地板,包含有天板及肋骨结构,以令该肋骨结构与该天板采用铝合金一体成型铸造,其中,该天板上形成有多个贯穿的穿孔,以形成50%以上的通风量,故能满足半导体工艺清净度的需求。
Standard grid floor
标准型格栅地板
HUANG JIANDE (author)
2024-03-22
Patent
Electronic Resource
Chinese