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High-density CZT target material and preparation method thereof
The invention belongs to the technical field of preparation of target materials, and discloses a preparation method of a high-density CZT target material, which comprises the following steps: mixing zinc powder, cadmium telluride powder, tellurium powder and silver powder according to a mass ratio of (9-15): 65: (20-30): (0.01-0.03) to obtain powder I, sintering, crushing and sieving the powder I to obtain powder II with the particle size of 80-120 meshes and powder III with the particle size of 180-220 meshes, and sintering, crushing and sieving the powder II to obtain the high-density CZT target material. The preparation method comprises the following steps: preparing a powder II and a powder III according to a mass ratio of (0.9-1.1): 1, further mixing and homogenizing the powder II and the powder III according to a mass ratio of (0.9-1.1): 1 to prepare a powder IV, then loading the powder IV into a mold for pressing to obtain a CZT biscuit, finally carrying out vacuum hot pressing and cooling on the CZT biscuit to prepare a high-density CZT target material, mixing silver powder, tellurium powder, cadmium powder and zinc powder, sintering to obtain CZT, crushing, sieving, and carrying out hot pressing sintering to obtain the CZT target material. The density of the prepared target material reaches 99%, and in addition, the invention further discloses a high-density CZT target material.
本申请属于靶材制备技术领域，公开了一种高密度CZT靶材的制备方法，该方法先将锌粉、碲化镉粉、碲粉、银粉按9～15：65：20～30：0.01～0.03的质量比混合，得到粉体一，再将粉体一烧结、破碎、过筛，得到粒径为80～120目的粉体二和粒径为180～220目的粉体三，进一步将粉体二和粉体三按照0.9～1.1：1的质量比混合、均质，制得粉体四，随后将粉体四装入模具中压结，得到CZT素坯，最后将CZT素坯真空热压、冷却，制得高密度CZT靶材，通过以银粉、与碲粉、镉粉、锌粉混合后烧结得到CZT，在经过破碎、过筛、热压烧结得到CZT靶材，制备的靶材致密度达到99％，此外，本申请还公开了一种高密度CZT靶材。
High-density CZT target material and preparation method thereof
The invention belongs to the technical field of preparation of target materials, and discloses a preparation method of a high-density CZT target material, which comprises the following steps: mixing zinc powder, cadmium telluride powder, tellurium powder and silver powder according to a mass ratio of (9-15): 65: (20-30): (0.01-0.03) to obtain powder I, sintering, crushing and sieving the powder I to obtain powder II with the particle size of 80-120 meshes and powder III with the particle size of 180-220 meshes, and sintering, crushing and sieving the powder II to obtain the high-density CZT target material. The preparation method comprises the following steps: preparing a powder II and a powder III according to a mass ratio of (0.9-1.1): 1, further mixing and homogenizing the powder II and the powder III according to a mass ratio of (0.9-1.1): 1 to prepare a powder IV, then loading the powder IV into a mold for pressing to obtain a CZT biscuit, finally carrying out vacuum hot pressing and cooling on the CZT biscuit to prepare a high-density CZT target material, mixing silver powder, tellurium powder, cadmium powder and zinc powder, sintering to obtain CZT, crushing, sieving, and carrying out hot pressing sintering to obtain the CZT target material. The density of the prepared target material reaches 99%, and in addition, the invention further discloses a high-density CZT target material.
本申请属于靶材制备技术领域，公开了一种高密度CZT靶材的制备方法，该方法先将锌粉、碲化镉粉、碲粉、银粉按9～15：65：20～30：0.01～0.03的质量比混合，得到粉体一，再将粉体一烧结、破碎、过筛，得到粒径为80～120目的粉体二和粒径为180～220目的粉体三，进一步将粉体二和粉体三按照0.9～1.1：1的质量比混合、均质，制得粉体四，随后将粉体四装入模具中压结，得到CZT素坯，最后将CZT素坯真空热压、冷却，制得高密度CZT靶材，通过以银粉、与碲粉、镉粉、锌粉混合后烧结得到CZT，在经过破碎、过筛、热压烧结得到CZT靶材，制备的靶材致密度达到99％，此外，本申请还公开了一种高密度CZT靶材。
High-density CZT target material and preparation method thereof
一种高密度CZT靶材及其制备方法
LUO HAIQI (author) / WEN CHONGBIN (author) / HU ZHIXIANG (author) / XU WENNA (author) / WANG PENGFEI (author) / ZHU ZHUONAN (author)
2024-03-29
Patent
Electronic Resource
Chinese
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