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5G ceramic dielectric filter material and preparation method thereof
The invention provides a preparation method of a 5G ceramic dielectric filter material, and the method comprises the following steps: S1, carrying out sand blasting or grinding and polishing treatment on the surface of a ceramic matrix, then immersing the treated ceramic matrix into an organic solvent for ultrasonic cleaning, and drying the cleaned ceramic matrix; s2, injecting first metal ions into the surface of the ceramic substrate treated in the step S1 by adopting a first metal target through a high-energy pulse ion injection method to form a transition layer; s3, depositing second metal on the transition layer prepared in the step S2 by adopting a second metal target through magnetic filter cathode vacuum arc deposition to form a connection layer; and S4, third metal is deposited on the connecting layer prepared in the step S3 through a multi-arc ion plating method and a third metal target, a surface metal layer is formed, and the filter film layer material is obtained. According to the preparation method of the film layer material, the highly-metallized silver layer with high compactness, low roughness and uniform thickness is obtained, so that the binding force between the substrate ceramic layer and the metal film silver layer is good, and the insertion loss is low.
本发明提供了一种5G陶瓷介质滤波器材料的制备方法,所述方法包括以下步骤:S1、对陶瓷基体表面进行进行喷砂或磨抛处理,随后将处理后的陶瓷基体浸入有机溶剂进行超声波清洗,将清洗后的陶瓷基体烘干;S2、通过高能脉冲离子注入法,采用第一金属靶,将第一金属离子注入步骤S1处理后的陶瓷基体表面上,形成过渡层;S3、通过磁过滤阴极真空弧沉积,采用第二金属靶,在步骤S2制备的过渡层上沉积第二金属,形成连接层;S4、通过多弧离子镀法,采用第三金属靶,在步骤S3制备的连接层上沉积第三金属,形成表面金属层,得到滤波器膜层材料。本发明膜层材料的制备方法得到了高致密性,低粗糙度,厚度均一性的高金属化银层,使得基底陶瓷层与金属膜银层的结合力好,插损低。
5G ceramic dielectric filter material and preparation method thereof
The invention provides a preparation method of a 5G ceramic dielectric filter material, and the method comprises the following steps: S1, carrying out sand blasting or grinding and polishing treatment on the surface of a ceramic matrix, then immersing the treated ceramic matrix into an organic solvent for ultrasonic cleaning, and drying the cleaned ceramic matrix; s2, injecting first metal ions into the surface of the ceramic substrate treated in the step S1 by adopting a first metal target through a high-energy pulse ion injection method to form a transition layer; s3, depositing second metal on the transition layer prepared in the step S2 by adopting a second metal target through magnetic filter cathode vacuum arc deposition to form a connection layer; and S4, third metal is deposited on the connecting layer prepared in the step S3 through a multi-arc ion plating method and a third metal target, a surface metal layer is formed, and the filter film layer material is obtained. According to the preparation method of the film layer material, the highly-metallized silver layer with high compactness, low roughness and uniform thickness is obtained, so that the binding force between the substrate ceramic layer and the metal film silver layer is good, and the insertion loss is low.
本发明提供了一种5G陶瓷介质滤波器材料的制备方法,所述方法包括以下步骤:S1、对陶瓷基体表面进行进行喷砂或磨抛处理,随后将处理后的陶瓷基体浸入有机溶剂进行超声波清洗,将清洗后的陶瓷基体烘干;S2、通过高能脉冲离子注入法,采用第一金属靶,将第一金属离子注入步骤S1处理后的陶瓷基体表面上,形成过渡层;S3、通过磁过滤阴极真空弧沉积,采用第二金属靶,在步骤S2制备的过渡层上沉积第二金属,形成连接层;S4、通过多弧离子镀法,采用第三金属靶,在步骤S3制备的连接层上沉积第三金属,形成表面金属层,得到滤波器膜层材料。本发明膜层材料的制备方法得到了高致密性,低粗糙度,厚度均一性的高金属化银层,使得基底陶瓷层与金属膜银层的结合力好,插损低。
5G ceramic dielectric filter material and preparation method thereof
一种5G陶瓷介质滤波器材料及其制备方法
DUAN TAO (author) / ZHANG HONGYI (author) / QUAN YATONG (author) / LUO JUN (author) / WANG GUOLIANG (author)
2024-03-29
Patent
Electronic Resource
Chinese
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