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A platform for research: civil engineering, architecture and urbanism
Carbon-carbon composite material product and preparation method thereof
The invention belongs to the technical field of carbon-carbon composite materials, and particularly relates to a carbon-carbon composite material product and a preparation method thereof. The high-density and high-breathability carbon-carbon composite material product is prepared through vapor deposition densification, resin impregnation-carbonization densification and purification processes, the product can be a breathable ring, the breathable ring made of the carbon-carbon composite material better meets the use requirements of the semiconductor industry, meanwhile, the thermal field mechanical property of the breathable ring is higher, the thermal deformation amount is low, and the service life of the breathable ring is prolonged. The heat-conducting property is more excellent, the service life is longer, the energy consumption is lower, the production cost of enterprises can be reduced, and the ever-increasing requirements of semiconductor industry accessories are met.
本发明属于碳碳复合材料技术领域，具体涉及一种碳碳复合材料制品及其制备方法。本发明通过气相沉积增密、树脂浸渍‑碳化增密和纯化工艺制备得到高密度、高透气性的碳碳复合材料制品，所述制品可以为透气环，该碳碳复合材料的透气环更符合半导体产业的使用要求，同时其热场力学性能更高，热变形量低，导热性能更优越，使用寿命更长，能耗更低，可降低企业生产成本，满足日益增长的半导体产业配件需求。
Carbon-carbon composite material product and preparation method thereof
The invention belongs to the technical field of carbon-carbon composite materials, and particularly relates to a carbon-carbon composite material product and a preparation method thereof. The high-density and high-breathability carbon-carbon composite material product is prepared through vapor deposition densification, resin impregnation-carbonization densification and purification processes, the product can be a breathable ring, the breathable ring made of the carbon-carbon composite material better meets the use requirements of the semiconductor industry, meanwhile, the thermal field mechanical property of the breathable ring is higher, the thermal deformation amount is low, and the service life of the breathable ring is prolonged. The heat-conducting property is more excellent, the service life is longer, the energy consumption is lower, the production cost of enterprises can be reduced, and the ever-increasing requirements of semiconductor industry accessories are met.
本发明属于碳碳复合材料技术领域，具体涉及一种碳碳复合材料制品及其制备方法。本发明通过气相沉积增密、树脂浸渍‑碳化增密和纯化工艺制备得到高密度、高透气性的碳碳复合材料制品，所述制品可以为透气环，该碳碳复合材料的透气环更符合半导体产业的使用要求，同时其热场力学性能更高，热变形量低，导热性能更优越，使用寿命更长，能耗更低，可降低企业生产成本，满足日益增长的半导体产业配件需求。
Carbon-carbon composite material product and preparation method thereof
一种碳碳复合材料制品及其制备方法
JIANG JIE (author) / JIA LINTAO (author) / TAN GONGFENG (author) / IKEZAWA SATOSHI (author)
2024-04-26
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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