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SiBCN interface layer, SiCf/SiC ceramic-based composite material protected by SiBCN interface layer and preparation method of SiCf/SiC ceramic-based composite material
The invention relates to a SiBCN interface layer, a SiCf/SiC ceramic-based composite material protected by the SiBCN interface layer and a preparation method of the SiCf/SiC ceramic-based composite material. The preparation method of the SiBCN interface layer comprises the following steps: (1) fixing a fiber preform with a clamp, placing the fiber preform in a reaction chamber in a furnace, raising the temperature to a deposition temperature of 600-850 oC in a vacuum state, and keeping the temperature for 0.5-2 hours; (2) CH3Cl3Si is used as a silicon source and a carbon source, BCl3 is used as a boron source, NH3 is used as a nitrogen source, H2 is used as a diluent gas and a carrier gas, Ar is used as a diluent gas, NH3 and BCl3 are controlled to be conveyed into the reaction chamber through different conveying pipelines, deposition is carried out for 2-20 h under the conditions of 0.01-3 KPa and 600-850 DEG C, and a SiBCN interface layer is prepared on the fiber surface in the fiber preform; and (3) carrying out stabilization treatment on the fiber preform deposited with the SiBCN interface layer to obtain the high-performance SiBCN interface layer.
本发明涉及SiBCN界面层、SiBCN界面层保护SiCf/SiC陶瓷基复合材料及其制备方法。其中，SiBCN界面层的制备方法包括：(1)将纤维预制体用夹具固定并放置于炉内反应室中，在真空状态下升温至沉积温度600～850οC并保温0.5h～2h；(2)三氯甲基硅烷以CH3Cl3Si为硅源和碳源，BCl3为硼源，NH3为氮源，H2为稀释气体和载气，Ar为稀释气体，控制NH3和BCl3分别通过不同的输送管道输送至反应室内，在0.01～3KPa，600～850℃下沉积2h～20h，在纤维预制体中纤维表面制备得到SiBCN界面层；(3)将沉积有SiBCN界面层的纤维预制体经稳定化处理，得到所述高性能SiBCN界面层。
SiBCN interface layer, SiCf/SiC ceramic-based composite material protected by SiBCN interface layer and preparation method of SiCf/SiC ceramic-based composite material
The invention relates to a SiBCN interface layer, a SiCf/SiC ceramic-based composite material protected by the SiBCN interface layer and a preparation method of the SiCf/SiC ceramic-based composite material. The preparation method of the SiBCN interface layer comprises the following steps: (1) fixing a fiber preform with a clamp, placing the fiber preform in a reaction chamber in a furnace, raising the temperature to a deposition temperature of 600-850 oC in a vacuum state, and keeping the temperature for 0.5-2 hours; (2) CH3Cl3Si is used as a silicon source and a carbon source, BCl3 is used as a boron source, NH3 is used as a nitrogen source, H2 is used as a diluent gas and a carrier gas, Ar is used as a diluent gas, NH3 and BCl3 are controlled to be conveyed into the reaction chamber through different conveying pipelines, deposition is carried out for 2-20 h under the conditions of 0.01-3 KPa and 600-850 DEG C, and a SiBCN interface layer is prepared on the fiber surface in the fiber preform; and (3) carrying out stabilization treatment on the fiber preform deposited with the SiBCN interface layer to obtain the high-performance SiBCN interface layer.
本发明涉及SiBCN界面层、SiBCN界面层保护SiCf/SiC陶瓷基复合材料及其制备方法。其中，SiBCN界面层的制备方法包括：(1)将纤维预制体用夹具固定并放置于炉内反应室中，在真空状态下升温至沉积温度600～850οC并保温0.5h～2h；(2)三氯甲基硅烷以CH3Cl3Si为硅源和碳源，BCl3为硼源，NH3为氮源，H2为稀释气体和载气，Ar为稀释气体，控制NH3和BCl3分别通过不同的输送管道输送至反应室内，在0.01～3KPa，600～850℃下沉积2h～20h，在纤维预制体中纤维表面制备得到SiBCN界面层；(3)将沉积有SiBCN界面层的纤维预制体经稳定化处理，得到所述高性能SiBCN界面层。
SiBCN interface layer, SiCf/SiC ceramic-based composite material protected by SiBCN interface layer and preparation method of SiCf/SiC ceramic-based composite material
SiBCN界面层、SiBCN界面层保护SiCf/SiC陶瓷基复合材料及其制备方法
LIAO CHUNJING (author) / DONG SHAOMING (author) / HU JIANBAO (author) / KAN YANMEI (author) / CHEN XIAOWU (author) / YU FENG (author) / XU BING (author) / LIN LING (author)
2024-04-30
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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