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Preparation method of 2.5-inch vanadium dioxide film
The invention discloses a preparation method of a 2.5-inch vanadium dioxide film, and belongs to the technical field of vanadium dioxide film preparation. The rectification method for preparing the 2.5-inch vanadium dioxide thin film aims at solving the problem that in the background technology, when a vanadium dioxide thin film is prepared through a PAD method, the atmosphere in a tube furnace is prone to fluctuating in the heat treatment process, and therefore the quality of the prepared vanadium dioxide thin film is affected. A set of airflow uniformizing device is designed, airflow entering the tube furnace is stably and uniformly dispersed around the porcelain boat through the airflow uniformizing device, so that a stable heat treatment atmosphere is provided, a high-quality vanadium dioxide film can be obtained, and the device is simple, convenient and easy to operate.
该发明公开了一种2.5英寸二氧化钒薄膜的制备方法，属于二氧化钒薄膜制备技术领域。针对背景技术所存在的采用PAD法制备二氧化钒薄膜时，热处理过程中管式炉内气氛容易发生波动从而影响制备二氧化钒薄膜质量的问题，本发明的目的在于提供一种制备2.5英寸二氧化钒薄膜的整流方法。本发明设计了一套气流均匀装置，使进入管式炉内的气流经过气流均匀装置稳定且均匀地分散在瓷舟周围，从而提供稳定的热处理气氛，使得能够得到高质量的二氧化钒薄膜，且该装置简便易于操作。
Preparation method of 2.5-inch vanadium dioxide film
The invention discloses a preparation method of a 2.5-inch vanadium dioxide film, and belongs to the technical field of vanadium dioxide film preparation. The rectification method for preparing the 2.5-inch vanadium dioxide thin film aims at solving the problem that in the background technology, when a vanadium dioxide thin film is prepared through a PAD method, the atmosphere in a tube furnace is prone to fluctuating in the heat treatment process, and therefore the quality of the prepared vanadium dioxide thin film is affected. A set of airflow uniformizing device is designed, airflow entering the tube furnace is stably and uniformly dispersed around the porcelain boat through the airflow uniformizing device, so that a stable heat treatment atmosphere is provided, a high-quality vanadium dioxide film can be obtained, and the device is simple, convenient and easy to operate.
该发明公开了一种2.5英寸二氧化钒薄膜的制备方法，属于二氧化钒薄膜制备技术领域。针对背景技术所存在的采用PAD法制备二氧化钒薄膜时，热处理过程中管式炉内气氛容易发生波动从而影响制备二氧化钒薄膜质量的问题，本发明的目的在于提供一种制备2.5英寸二氧化钒薄膜的整流方法。本发明设计了一套气流均匀装置，使进入管式炉内的气流经过气流均匀装置稳定且均匀地分散在瓷舟周围，从而提供稳定的热处理气氛，使得能够得到高质量的二氧化钒薄膜，且该装置简便易于操作。
Preparation method of 2.5-inch vanadium dioxide film
一种2.5英寸二氧化钒薄膜的制备方法
GAO MIN (author) / ZHANG JIAJIA (author) / LIN YUAN (author) / LUO YIHENG (author) / LU CHANG (author) / PAN TAISONG (author)
2024-04-30
Patent
Electronic Resource
Chinese