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A platform for research: civil engineering, architecture and urbanism
Microporous ceramic material and preparation method thereof as well as ceramic sucker and preparation method thereof
The invention discloses a microporous ceramic material which comprises the following raw materials in parts by weight: 60-90 parts of silicon carbide, 10-30 parts of a sintering aid, 5-40 parts of a pore forming agent and 8-12 parts of a plasticizer. In the preparation process, the microporous ceramic material is mixed after being subjected to two times of centrifugal spray granulation, so that the uniformity of the pore structure of the ceramic material is ensured, the adsorption capacity of the ceramic material is more uniform, the pore diameter range is adjustable, and in the preparation process, the sintering temperature of silicon carbide is greatly reduced by adopting a liquid phase sintering mode; meanwhile, three times of sintering are adopted to ensure that the pore-forming agent has no residue; in the preparation process, the method is simple to operate, high in production efficiency and low in production cost, and the silicon carbide ceramic has a thermal expansion coefficient close to that of a semiconductor silicon wafer and can be widely applied to related fields of semiconductors.
本发明公开一种微孔陶瓷材料，包括有以下重量份原料：碳化硅60‑90份，烧结助剂10‑30份，造孔剂5‑40份以及塑化剂8‑12份。本发明在制备过程中，微孔陶瓷材料采用两次离心喷雾造粒后混合，保证了陶瓷材料孔结构的均匀性，使其吸附力更均匀，且孔径范围可调，并且，在制备过程中，采用液相烧结的方式大大降低了碳化硅的烧结温度；同时采用三次烧结，确保造孔剂无残留；而制备过程中方法操作简单，生产效率高，生产成本低，碳化硅陶瓷与半导体硅片接近的热膨胀系数，能够广泛用于半导体相关领域。
Microporous ceramic material and preparation method thereof as well as ceramic sucker and preparation method thereof
The invention discloses a microporous ceramic material which comprises the following raw materials in parts by weight: 60-90 parts of silicon carbide, 10-30 parts of a sintering aid, 5-40 parts of a pore forming agent and 8-12 parts of a plasticizer. In the preparation process, the microporous ceramic material is mixed after being subjected to two times of centrifugal spray granulation, so that the uniformity of the pore structure of the ceramic material is ensured, the adsorption capacity of the ceramic material is more uniform, the pore diameter range is adjustable, and in the preparation process, the sintering temperature of silicon carbide is greatly reduced by adopting a liquid phase sintering mode; meanwhile, three times of sintering are adopted to ensure that the pore-forming agent has no residue; in the preparation process, the method is simple to operate, high in production efficiency and low in production cost, and the silicon carbide ceramic has a thermal expansion coefficient close to that of a semiconductor silicon wafer and can be widely applied to related fields of semiconductors.
本发明公开一种微孔陶瓷材料，包括有以下重量份原料：碳化硅60‑90份，烧结助剂10‑30份，造孔剂5‑40份以及塑化剂8‑12份。本发明在制备过程中，微孔陶瓷材料采用两次离心喷雾造粒后混合，保证了陶瓷材料孔结构的均匀性，使其吸附力更均匀，且孔径范围可调，并且，在制备过程中，采用液相烧结的方式大大降低了碳化硅的烧结温度；同时采用三次烧结，确保造孔剂无残留；而制备过程中方法操作简单，生产效率高，生产成本低，碳化硅陶瓷与半导体硅片接近的热膨胀系数，能够广泛用于半导体相关领域。
Microporous ceramic material and preparation method thereof as well as ceramic sucker and preparation method thereof
微孔陶瓷材料及制备方法、陶瓷吸盘及制备方法
CHEN WENJIE (author) / CHANG XINFENG (author) / JIA LUHAO (author) / LIU XUEMING (author)
2024-06-11
Patent
Electronic Resource
Chinese
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