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Cesium-tungsten bronze ceramic target material for energy-saving glass field and preparation method of cesium-tungsten bronze ceramic target material
The invention discloses a cesium-tungsten bronze ceramic target material used in the field of energy-saving glass and a preparation method of the cesium-tungsten bronze ceramic target material. The preparation method comprises the following steps: pre-pressing and forming cesium-tungsten bronze powder to obtain a cesium-tungsten bronze initial blank; performing cold isostatic pressing on the cesium-tungsten bronze primary green body to obtain a cesium-tungsten bronze secondary green body; the cesium-tungsten bronze secondary green body is sintered under the protective atmosphere to obtain a cesium-tungsten bronze target blank, the average particle size of the cesium-tungsten bronze target blank is 1-15 microns, the density is larger than 85%, and the purity is larger than 99.9%; and machining the cesium-tungsten bronze target blank to obtain the cesium-tungsten bronze ceramic target material. The prepared cesium-tungsten bronze ceramic target material is uniform in microstructure, fine and uniform in crystal grain, high in density and uniform in component, the purity is larger than 99.9%, the requirement for subsequent magnetron sputtering coating is met, the cost is low, and a cesium-tungsten bronze film obtained through magnetron sputtering of the cesium-tungsten bronze ceramic target material disclosed by the embodiment of the invention is uniform in structure, uniform in component and good in mechanical property. The near-infrared light shielding effect is good, the visible light transmittance is high, and the service life is long.
本发明公开了用于节能玻璃领域的铯钨青铜陶瓷靶材及其制备方法。该制备方法包括：将铯钨青铜粉末预压制成型得到铯钨青铜初生坯；将铯钨青铜初生坯冷等静压得到铯钨青铜次生坯；将铯钨青铜次生坯在保护气氛下烧结得到铯钨青铜靶坯，铯钨青铜靶坯的平均粒径为1～15μm，致密度大于85％，纯度大于99.9％；将铯钨青铜靶坯机加工得到铯钨青铜陶瓷靶材。制备得到的铯钨青铜陶瓷靶材微观组织均匀、晶粒细小均匀、致密度高，成分均匀、纯度大于99.9％、满足后续磁控溅射镀膜的要求，成本低，且采用本发明实施例公开的铯钨青铜陶瓷靶材磁控溅射得到的铯钨青铜薄膜组织均匀，成分均匀，近红外光屏蔽效果好，可见光透过率高，使用寿命长。
Cesium-tungsten bronze ceramic target material for energy-saving glass field and preparation method of cesium-tungsten bronze ceramic target material
The invention discloses a cesium-tungsten bronze ceramic target material used in the field of energy-saving glass and a preparation method of the cesium-tungsten bronze ceramic target material. The preparation method comprises the following steps: pre-pressing and forming cesium-tungsten bronze powder to obtain a cesium-tungsten bronze initial blank; performing cold isostatic pressing on the cesium-tungsten bronze primary green body to obtain a cesium-tungsten bronze secondary green body; the cesium-tungsten bronze secondary green body is sintered under the protective atmosphere to obtain a cesium-tungsten bronze target blank, the average particle size of the cesium-tungsten bronze target blank is 1-15 microns, the density is larger than 85%, and the purity is larger than 99.9%; and machining the cesium-tungsten bronze target blank to obtain the cesium-tungsten bronze ceramic target material. The prepared cesium-tungsten bronze ceramic target material is uniform in microstructure, fine and uniform in crystal grain, high in density and uniform in component, the purity is larger than 99.9%, the requirement for subsequent magnetron sputtering coating is met, the cost is low, and a cesium-tungsten bronze film obtained through magnetron sputtering of the cesium-tungsten bronze ceramic target material disclosed by the embodiment of the invention is uniform in structure, uniform in component and good in mechanical property. The near-infrared light shielding effect is good, the visible light transmittance is high, and the service life is long.
本发明公开了用于节能玻璃领域的铯钨青铜陶瓷靶材及其制备方法。该制备方法包括：将铯钨青铜粉末预压制成型得到铯钨青铜初生坯；将铯钨青铜初生坯冷等静压得到铯钨青铜次生坯；将铯钨青铜次生坯在保护气氛下烧结得到铯钨青铜靶坯，铯钨青铜靶坯的平均粒径为1～15μm，致密度大于85％，纯度大于99.9％；将铯钨青铜靶坯机加工得到铯钨青铜陶瓷靶材。制备得到的铯钨青铜陶瓷靶材微观组织均匀、晶粒细小均匀、致密度高，成分均匀、纯度大于99.9％、满足后续磁控溅射镀膜的要求，成本低，且采用本发明实施例公开的铯钨青铜陶瓷靶材磁控溅射得到的铯钨青铜薄膜组织均匀，成分均匀，近红外光屏蔽效果好，可见光透过率高，使用寿命长。
Cesium-tungsten bronze ceramic target material for energy-saving glass field and preparation method of cesium-tungsten bronze ceramic target material
用于节能玻璃领域的铯钨青铜陶瓷靶材及其制备方法
ZHANG LONGZHEN (author) / GUO JIAHAO (author) / HE XIN (author) / WU XIAOCHAO (author) / LI QINGKUI (author) / WANG CHENGDUO (author) / HE JILIN (author)
2024-06-18
Patent
Electronic Resource
Chinese
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