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Lithium phosphate target material and preparation method thereof
The invention belongs to the technical field of lithium phosphate planar targets, and discloses a lithium phosphate target and a preparation method thereof.The preparation method of the lithium phosphate target comprises the following steps that 1, lithium phosphate powder is put into a mold to be pre-pressed, and the pressure ranges from 5 Mpa to 10 Mpa; and 2, hot pressing is conducted after prepressing in the step 1 is completed, the mold is heated to 750-850 DEG C in the environment with the vacuum degree smaller than 100 pa, then the mold is pressurized to 40-60 Mpa, and finally heat preservation and pressure maintaining are conducted for 60-120 min to obtain the lithium phosphate target material. According to the method, the pre-pressing operation under specific pressure is performed before the lithium phosphate target material is prepared through hot pressing sintering, so that the sintering contact area of the lithium phosphate target material is controlled, the grain growth condition of the lithium phosphate target material in the subsequent hot pressing sintering process is effectively controlled, and the grain size difference in the lithium phosphate target material is reduced.
本发明属于磷酸锂平面靶技术领域，公开了一种磷酸锂靶材及其制备方法，该磷酸锂靶材的制备方法，包括如下步骤：步骤1：将磷酸锂粉体装入模具进行预压，压力为5‑10Mpa；步骤2：步骤1预压完成后进行热压，在真空度＜100pa的环境下将模具升温至750‑850℃后对模具加压至40‑60Mpa，最后保温保压60‑120min得到磷酸锂靶材。本发明在热压烧结制备磷酸锂靶材前先进行特定压力的预压操作，从而控制了磷酸锂靶材的烧结接触面积，有效控制后续热压烧结工序的磷酸锂靶材晶粒生长情况，降低了磷酸锂靶材中的晶粒尺寸差异。
Lithium phosphate target material and preparation method thereof
The invention belongs to the technical field of lithium phosphate planar targets, and discloses a lithium phosphate target and a preparation method thereof.The preparation method of the lithium phosphate target comprises the following steps that 1, lithium phosphate powder is put into a mold to be pre-pressed, and the pressure ranges from 5 Mpa to 10 Mpa; and 2, hot pressing is conducted after prepressing in the step 1 is completed, the mold is heated to 750-850 DEG C in the environment with the vacuum degree smaller than 100 pa, then the mold is pressurized to 40-60 Mpa, and finally heat preservation and pressure maintaining are conducted for 60-120 min to obtain the lithium phosphate target material. According to the method, the pre-pressing operation under specific pressure is performed before the lithium phosphate target material is prepared through hot pressing sintering, so that the sintering contact area of the lithium phosphate target material is controlled, the grain growth condition of the lithium phosphate target material in the subsequent hot pressing sintering process is effectively controlled, and the grain size difference in the lithium phosphate target material is reduced.
本发明属于磷酸锂平面靶技术领域，公开了一种磷酸锂靶材及其制备方法，该磷酸锂靶材的制备方法，包括如下步骤：步骤1：将磷酸锂粉体装入模具进行预压，压力为5‑10Mpa；步骤2：步骤1预压完成后进行热压，在真空度＜100pa的环境下将模具升温至750‑850℃后对模具加压至40‑60Mpa，最后保温保压60‑120min得到磷酸锂靶材。本发明在热压烧结制备磷酸锂靶材前先进行特定压力的预压操作，从而控制了磷酸锂靶材的烧结接触面积，有效控制后续热压烧结工序的磷酸锂靶材晶粒生长情况，降低了磷酸锂靶材中的晶粒尺寸差异。
Lithium phosphate target material and preparation method thereof
一种磷酸锂靶材及其制备方法
LI YUNHONG (author) / WEN CHONGBIN (author)
2024-07-05
Patent
Electronic Resource
Chinese
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