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Yttrium silicate ceramic material as well as preparation method and application thereof
The invention discloses an yttrium silicate ceramic material as well as a preparation method and application thereof, and the yttrium silicate ceramic material comprises the following components in percentage by mass: 65-80% of yttrium oxide, 15-30% of silicon dioxide and 2-8% of zirconium oxide. The yttrium silicate ceramic sand grains obtained by the preparation method are processed by an electric arc heating centrifugal crucible manufacturing machine to obtain the yttrium silicate ceramic crucible for silicon single crystal drawing. The yttrium silicate ceramic material is reasonable in proportion, the overall fracture toughness of the material is remarkably improved, so that the service life of a crucible is prolonged, the reliability of the crucible is improved, the crucible prepared with the preparation method is better in quality uniformity of monocrystalline silicon during monocrystalline silicon drawing, the production efficiency is improved, and the cost is reduced.
本发明介绍了一种硅酸钇陶瓷材料及其制备方法和应用，按质量百分比计，包括65‑80%的氧化钇、15‑30%的二氧化硅和2‑8%的氧化锆；制备方法得到的硅酸钇陶瓷砂粒，利用电弧加热离心坩埚制造机进行加工得到硅单晶拉制用硅酸钇陶瓷坩埚。本发明的硅酸钇陶瓷材料，配比合理，显著提升材料整体的断裂韧性，从而提升坩埚的使用寿命和可靠性，并配合本发明的制备方法，制备的坩埚在单晶硅拉制时单晶的质量均一性也更好，提高生产效率，降低成本。
Yttrium silicate ceramic material as well as preparation method and application thereof
The invention discloses an yttrium silicate ceramic material as well as a preparation method and application thereof, and the yttrium silicate ceramic material comprises the following components in percentage by mass: 65-80% of yttrium oxide, 15-30% of silicon dioxide and 2-8% of zirconium oxide. The yttrium silicate ceramic sand grains obtained by the preparation method are processed by an electric arc heating centrifugal crucible manufacturing machine to obtain the yttrium silicate ceramic crucible for silicon single crystal drawing. The yttrium silicate ceramic material is reasonable in proportion, the overall fracture toughness of the material is remarkably improved, so that the service life of a crucible is prolonged, the reliability of the crucible is improved, the crucible prepared with the preparation method is better in quality uniformity of monocrystalline silicon during monocrystalline silicon drawing, the production efficiency is improved, and the cost is reduced.
本发明介绍了一种硅酸钇陶瓷材料及其制备方法和应用，按质量百分比计，包括65‑80%的氧化钇、15‑30%的二氧化硅和2‑8%的氧化锆；制备方法得到的硅酸钇陶瓷砂粒，利用电弧加热离心坩埚制造机进行加工得到硅单晶拉制用硅酸钇陶瓷坩埚。本发明的硅酸钇陶瓷材料，配比合理，显著提升材料整体的断裂韧性，从而提升坩埚的使用寿命和可靠性，并配合本发明的制备方法，制备的坩埚在单晶硅拉制时单晶的质量均一性也更好，提高生产效率，降低成本。
Yttrium silicate ceramic material as well as preparation method and application thereof
一种硅酸钇陶瓷材料及其制备方法和应用
CHEN ZHIQIANG (author)
2024-10-11
Patent
Electronic Resource
Chinese
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