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Electrostatic chuck component and electrostatic chuck device
This electrostatic chuck component is provided with: a plate-shaped base body that has a mounting surface on which a sample is mounted, and a lower surface on the opposite side from the mounting surface, and that is provided with an electrode layer that is positioned between the mounting surface and the lower surface and that extends along the mounting surface, and a columnar power supply unit that extends from the electrode layer toward the lower surface side; and a terminal member connected to an end surface of the power supply section, the power supply section having an outer diameter of 2 mm or more, the power supply section and the terminal member being brazed and connected in a brazed section, and the brazed section being positioned closer to the lower surface side than a position 1/2 between the lower surface of the base and the electrode layer.
一种静电卡盘部件，其具备：板状基体，具有搭载试样的载置面及位于与载置面相反的一侧的下表面，并且具备位于载置面与下表面之间且沿载置面延伸的电极层及从电极层向下表面侧延伸的柱状供电部；及端子部件，与供电部的端面连接，供电部的外径为2mm以上，供电部与端子部件在钎焊部中钎焊连接，钎焊部位于比基体的下表面与电极层之间的1/2的位置更靠下表面侧的位置。
Electrostatic chuck component and electrostatic chuck device
This electrostatic chuck component is provided with: a plate-shaped base body that has a mounting surface on which a sample is mounted, and a lower surface on the opposite side from the mounting surface, and that is provided with an electrode layer that is positioned between the mounting surface and the lower surface and that extends along the mounting surface, and a columnar power supply unit that extends from the electrode layer toward the lower surface side; and a terminal member connected to an end surface of the power supply section, the power supply section having an outer diameter of 2 mm or more, the power supply section and the terminal member being brazed and connected in a brazed section, and the brazed section being positioned closer to the lower surface side than a position 1/2 between the lower surface of the base and the electrode layer.
一种静电卡盘部件，其具备：板状基体，具有搭载试样的载置面及位于与载置面相反的一侧的下表面，并且具备位于载置面与下表面之间且沿载置面延伸的电极层及从电极层向下表面侧延伸的柱状供电部；及端子部件，与供电部的端面连接，供电部的外径为2mm以上，供电部与端子部件在钎焊部中钎焊连接，钎焊部位于比基体的下表面与电极层之间的1/2的位置更靠下表面侧的位置。
Electrostatic chuck component and electrostatic chuck device
静电卡盘部件及静电卡盘装置
OISHI KENTA (author) / MIURA YUKIO (author) / MAETA SHINICHI (author) / MORISHITA NORITO (author)
2024-10-22
Patent
Electronic Resource
Chinese
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