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Method for producing quartz member, method for forming silica coating layer, and method for smoothing surface of quartz member
A method for forming a silica coating layer by spraying silica on the outer peripheral surface of a quartz base material (1) using a burner (4), the method being characterized in that: a thermally conductive material having a thermal conductivity of 30 W/m.k or more at 25 DEG C is embedded in an inner hole of the quartz base material (1), and the silica coating layer is formed by spraying the silica on the outer peripheral surface of the quartz base material (1) by spraying the silica on the outer peripheral surface of the quartz base material (1); the inner peripheral surface of the quartz base material (1) is in contact with the outer peripheral surface of the heat-conducting material (5).
一种二氧化硅涂层的形成方法，其特征在于，其是使用燃烧器4将二氧化硅喷镀在石英制基材1的外周面而形成二氧化硅涂层的方法，该方法中，将导热系数在25℃下为30W/m·k以上的导热材料嵌入石英制基材1的内孔中，以石英制基材1内周面与导热材料5的外周面接触的状态进行喷镀。
Method for producing quartz member, method for forming silica coating layer, and method for smoothing surface of quartz member
A method for forming a silica coating layer by spraying silica on the outer peripheral surface of a quartz base material (1) using a burner (4), the method being characterized in that: a thermally conductive material having a thermal conductivity of 30 W/m.k or more at 25 DEG C is embedded in an inner hole of the quartz base material (1), and the silica coating layer is formed by spraying the silica on the outer peripheral surface of the quartz base material (1) by spraying the silica on the outer peripheral surface of the quartz base material (1); the inner peripheral surface of the quartz base material (1) is in contact with the outer peripheral surface of the heat-conducting material (5).
一种二氧化硅涂层的形成方法，其特征在于，其是使用燃烧器4将二氧化硅喷镀在石英制基材1的外周面而形成二氧化硅涂层的方法，该方法中，将导热系数在25℃下为30W/m·k以上的导热材料嵌入石英制基材1的内孔中，以石英制基材1内周面与导热材料5的外周面接触的状态进行喷镀。
Method for producing quartz member, method for forming silica coating layer, and method for smoothing surface of quartz member
石英构件的制造方法、二氧化硅涂层的形成方法及石英制构件表面的平滑化方法
SOHEI MASAKI (author) / KATO YUICHI (author) / MIHARA SHOZO (author)
2024-11-05
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
C03B
Herstellung oder Formgebung von Glas, Mineral- oder Schlackenwolle
,
MANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL
/
C03C
Chemische Zusammensetzungen für Gläser, Glasuren oder Emails
,
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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