A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
The invention discloses a wafer ceramic nickel-palladium-gold surface treatment production line and a production process, the wafer ceramic nickel-palladium-gold surface treatment production line comprises two production lines arranged in parallel and a decomposition channel, the wafer ceramic nickel-palladium-gold surface treatment production line sequentially comprises a plurality of stations in the length direction, and the specific stations comprise a feeding and discharging station, a washing station, a nitrate hanging station, a hole filling copper plating station, a bridging copper plating station, a micro-etching station and an acid leaching station; an exchange station, a spray water washing station, a hot water washing station and an oil removal station; wherein the temperature of the hole filling copper plating station and the temperature of the bridging copper plating station are controlled through a high-frequency power source, the temperature and pressure of the micro-etching station and the temperature and pressure of the acid leaching station are monitored and adjusted through an automatic system, and homogenization of surface treatment is ensured; the spraying water washing station and the hot water washing station adopt an automatic spraying system for multiple times of cleaning, so that the cleanliness and activity of the surface of the material are optimized; according to the production line design, efficient operation of the process and accurate control of parameters are achieved, the production efficiency and the product quality are greatly improved, and the electroplating production line scheme is innovative.
本发明公开了一种晶圆陶瓷镍钯金表面处理生产线及生产工艺，包括两条并行设置的生产线和一个分解通道，沿长度方向依次包括多个工位，具体工位包括上下料工位，水洗工位，硝挂工位，填孔镀铜工位和搭桥镀铜工位，微蚀工位，酸浸工位，交换工位，喷淋水洗工位和热水洗工位，除油工位；其中，填孔镀铜工位和搭桥镀铜工位通过高频电源控制温度，而微蚀工位和酸浸工位则由自动化系统监控调节温度和压力，确保表面处理的均质化；喷淋水洗工位和热水洗工位采用自动化喷淋系统进行多次清洗，优化材料表面的清洁度和活性；本发明的生产线设计实现了工艺的高效运行和参数的精确控制，大大提高了生产效率和产品质量，是一种创新的电镀生产线方案。
The invention discloses a wafer ceramic nickel-palladium-gold surface treatment production line and a production process, the wafer ceramic nickel-palladium-gold surface treatment production line comprises two production lines arranged in parallel and a decomposition channel, the wafer ceramic nickel-palladium-gold surface treatment production line sequentially comprises a plurality of stations in the length direction, and the specific stations comprise a feeding and discharging station, a washing station, a nitrate hanging station, a hole filling copper plating station, a bridging copper plating station, a micro-etching station and an acid leaching station; an exchange station, a spray water washing station, a hot water washing station and an oil removal station; wherein the temperature of the hole filling copper plating station and the temperature of the bridging copper plating station are controlled through a high-frequency power source, the temperature and pressure of the micro-etching station and the temperature and pressure of the acid leaching station are monitored and adjusted through an automatic system, and homogenization of surface treatment is ensured; the spraying water washing station and the hot water washing station adopt an automatic spraying system for multiple times of cleaning, so that the cleanliness and activity of the surface of the material are optimized; according to the production line design, efficient operation of the process and accurate control of parameters are achieved, the production efficiency and the product quality are greatly improved, and the electroplating production line scheme is innovative.
本发明公开了一种晶圆陶瓷镍钯金表面处理生产线及生产工艺，包括两条并行设置的生产线和一个分解通道，沿长度方向依次包括多个工位，具体工位包括上下料工位，水洗工位，硝挂工位，填孔镀铜工位和搭桥镀铜工位，微蚀工位，酸浸工位，交换工位，喷淋水洗工位和热水洗工位，除油工位；其中，填孔镀铜工位和搭桥镀铜工位通过高频电源控制温度，而微蚀工位和酸浸工位则由自动化系统监控调节温度和压力，确保表面处理的均质化；喷淋水洗工位和热水洗工位采用自动化喷淋系统进行多次清洗，优化材料表面的清洁度和活性；本发明的生产线设计实现了工艺的高效运行和参数的精确控制，大大提高了生产效率和产品质量，是一种创新的电镀生产线方案。
Wafer ceramic nickel-palladium-gold surface treatment production line and production process
一种晶圆陶瓷镍钯金表面处理生产线及生产工艺
2024-11-12
Patent
Electronic Resource
Chinese
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