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Preparation method of high-purity yttrium oxide ceramic
According to the preparation method of the high-purity yttrium oxide ceramic, YF3 is used as a sintering aid, densification of the yttrium oxide ceramic is promoted in a vacuum atmosphere, meanwhile, the removal effect on impurities such as Na, Si and Fe is achieved, and the high-purity yttrium oxide ceramic is obtained. The yttrium oxide ceramic is suitable for a plasma environment in semiconductor equipment.
高纯氧化钇陶瓷的制备方法，以YF3为烧结助剂，在真空气氛中促进氧化钇陶瓷的致密化，同时实现对Na、Si、Fe等杂质的排除作用，获得高纯氧化钇陶瓷。该氧化钇陶瓷适用于半导体装备中的等离子体环境。
Preparation method of high-purity yttrium oxide ceramic
According to the preparation method of the high-purity yttrium oxide ceramic, YF3 is used as a sintering aid, densification of the yttrium oxide ceramic is promoted in a vacuum atmosphere, meanwhile, the removal effect on impurities such as Na, Si and Fe is achieved, and the high-purity yttrium oxide ceramic is obtained. The yttrium oxide ceramic is suitable for a plasma environment in semiconductor equipment.
高纯氧化钇陶瓷的制备方法，以YF3为烧结助剂，在真空气氛中促进氧化钇陶瓷的致密化，同时实现对Na、Si、Fe等杂质的排除作用，获得高纯氧化钇陶瓷。该氧化钇陶瓷适用于半导体装备中的等离子体环境。
Preparation method of high-purity yttrium oxide ceramic
高纯氧化钇陶瓷的制备方法
MAO XIAOJIAN (author)
2024-11-15
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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