A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Crucible and preparation method thereof
The invention provides a crucible and a preparation method thereof, and relates to the technical field of crucible preparation, and the crucible comprises a carbon-carbon ceramic substrate and a composite coating; the composite coating comprises a silicon carbide layer, a buffer layer, a sub composite layer and a silicon nitride layer which are stacked in sequence. And the sub composite layer comprises silicon nitride and silicon dioxide. The preparation method of the crucible comprises the following steps: preparing the carbon-carbon ceramic substrate; depositing a silicon carbide layer on the inner surface of the carbon-carbon ceramic substrate by adopting a chemical vapor deposition method; preparing a buffer layer on one side of the silicon carbide layer; preparing a sub composite layer on one side of the buffer layer; and depositing a silicon nitride layer on one side of the sub composite layer by adopting a chemical vapor deposition method. According to the crucible, the composite coating is arranged, the composite coating is stable in chemical performance, high in heat conductivity coefficient, good in abrasion resistance, good in permeation prevention capacity and high in binding force, the strength, the abrasion resistance and the permeation prevention capacity of the crucible can be improved through the composite coating, and the crucible can serve as a container for directly containing a silicon solution to replace a quartz crucible.
本申请提供了一种坩埚及其制备方法，涉及坩埚制备技术领域，其中坩埚包括碳碳陶瓷基底和复合涂层；复合涂层包括依次层叠的碳化硅层、缓冲层、子复合层和氮化硅层；子复合层包括氮化硅和二氧化硅。坩埚的制备方法，包括：制备碳碳陶瓷基底；采用化学气相沉积法在碳碳陶瓷基底内表面沉积碳化硅层；在碳化硅层的一侧制备缓冲层；在缓冲层的一侧制备子复合层；采用化学气相沉积法在子复合层的一侧沉积氮化硅层。本申请设置复合涂层，复合涂层化学性能稳定、导热系数高、耐磨性能较好，防渗透能力好，同时复合涂层的结合力较高，复合涂层有利于提高坩埚的强度、耐磨性能和防渗透能力，使坩埚能够作为直接盛放硅溶液的容器代替石英坩埚。
Crucible and preparation method thereof
The invention provides a crucible and a preparation method thereof, and relates to the technical field of crucible preparation, and the crucible comprises a carbon-carbon ceramic substrate and a composite coating; the composite coating comprises a silicon carbide layer, a buffer layer, a sub composite layer and a silicon nitride layer which are stacked in sequence. And the sub composite layer comprises silicon nitride and silicon dioxide. The preparation method of the crucible comprises the following steps: preparing the carbon-carbon ceramic substrate; depositing a silicon carbide layer on the inner surface of the carbon-carbon ceramic substrate by adopting a chemical vapor deposition method; preparing a buffer layer on one side of the silicon carbide layer; preparing a sub composite layer on one side of the buffer layer; and depositing a silicon nitride layer on one side of the sub composite layer by adopting a chemical vapor deposition method. According to the crucible, the composite coating is arranged, the composite coating is stable in chemical performance, high in heat conductivity coefficient, good in abrasion resistance, good in permeation prevention capacity and high in binding force, the strength, the abrasion resistance and the permeation prevention capacity of the crucible can be improved through the composite coating, and the crucible can serve as a container for directly containing a silicon solution to replace a quartz crucible.
本申请提供了一种坩埚及其制备方法，涉及坩埚制备技术领域，其中坩埚包括碳碳陶瓷基底和复合涂层；复合涂层包括依次层叠的碳化硅层、缓冲层、子复合层和氮化硅层；子复合层包括氮化硅和二氧化硅。坩埚的制备方法，包括：制备碳碳陶瓷基底；采用化学气相沉积法在碳碳陶瓷基底内表面沉积碳化硅层；在碳化硅层的一侧制备缓冲层；在缓冲层的一侧制备子复合层；采用化学气相沉积法在子复合层的一侧沉积氮化硅层。本申请设置复合涂层，复合涂层化学性能稳定、导热系数高、耐磨性能较好，防渗透能力好，同时复合涂层的结合力较高，复合涂层有利于提高坩埚的强度、耐磨性能和防渗透能力，使坩埚能够作为直接盛放硅溶液的容器代替石英坩埚。
Crucible and preparation method thereof
坩埚及其制备方法
LI HAO (author) / SONG LIPING (author) / LONG ZHAOQIN (author) / CHEN MING (author)
2024-11-22
Patent
Electronic Resource
Chinese