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Ultrahigh-purity graphite thermal field for semiconductors
The invention relates to an ultra-high-purity graphite thermal field for semiconductors, which comprises a graphite crucible substrate made of ultra-high-purity graphite for semiconductors and a graphite heater substrate made of ultra-high-purity graphite for semiconductors, and wear-resistant graphene layers are compounded on the surfaces of the graphite crucible substrate and the graphite heater substrate. The surface of a graphite crucible substrate/graphite heater substrate is pretreated through cooperation of megasonic and liquid-electric technologies and a super-strong oxidation solution, the pretreated graphite crucible substrate/graphite heater substrate is subjected to surface spraying of a graphene oxide solution to form a film, and finally high-temperature sintering is performed to obtain the graphene/graphite crucible/graphite heater composite film. A thicker wear-resistant graphene layer can be compounded on the surface of the graphite crucible substrate/graphite heater substrate; the wear-resistant graphene layer can inhibit the powder falling phenomenon of the ultra-pure graphite for the semiconductor at normal temperature and inhibit the volatilization of the ultra-pure graphite for the semiconductor at high temperature; in addition, the protective film is good in wear resistance and particularly suitable for outer layer protection of graphite crucibles and graphite heaters.
本发明涉及半导体用超高纯石墨热场，包括由半导体用超高纯石墨制成的石墨坩埚衬底、由半导体用超高纯石墨制成的石墨加热器衬底，石墨坩埚衬底和石墨加热器衬底的表面均复合有耐磨石墨烯层。本发明通过兆声+液电技术配合超强氧化液对石墨坩埚衬底/石墨加热器衬底的表面进行预处理，预处理后的石墨坩埚衬底/石墨加热器衬底，通过表面喷涂氧化石墨烯溶液成膜，最后高温烧结，即可在石墨坩埚衬底/石墨加热器衬底的表面复合成一层较厚的耐磨石墨烯层；该耐磨石墨烯层的能在常温下抑制半导体用超高纯石墨的掉粉现象，高温下抑制半导体用超高纯石墨的挥发；并且，其耐磨性好，特别适用于石墨坩埚和石墨加热器的外层防护。
Ultrahigh-purity graphite thermal field for semiconductors
The invention relates to an ultra-high-purity graphite thermal field for semiconductors, which comprises a graphite crucible substrate made of ultra-high-purity graphite for semiconductors and a graphite heater substrate made of ultra-high-purity graphite for semiconductors, and wear-resistant graphene layers are compounded on the surfaces of the graphite crucible substrate and the graphite heater substrate. The surface of a graphite crucible substrate/graphite heater substrate is pretreated through cooperation of megasonic and liquid-electric technologies and a super-strong oxidation solution, the pretreated graphite crucible substrate/graphite heater substrate is subjected to surface spraying of a graphene oxide solution to form a film, and finally high-temperature sintering is performed to obtain the graphene/graphite crucible/graphite heater composite film. A thicker wear-resistant graphene layer can be compounded on the surface of the graphite crucible substrate/graphite heater substrate; the wear-resistant graphene layer can inhibit the powder falling phenomenon of the ultra-pure graphite for the semiconductor at normal temperature and inhibit the volatilization of the ultra-pure graphite for the semiconductor at high temperature; in addition, the protective film is good in wear resistance and particularly suitable for outer layer protection of graphite crucibles and graphite heaters.
本发明涉及半导体用超高纯石墨热场，包括由半导体用超高纯石墨制成的石墨坩埚衬底、由半导体用超高纯石墨制成的石墨加热器衬底，石墨坩埚衬底和石墨加热器衬底的表面均复合有耐磨石墨烯层。本发明通过兆声+液电技术配合超强氧化液对石墨坩埚衬底/石墨加热器衬底的表面进行预处理，预处理后的石墨坩埚衬底/石墨加热器衬底，通过表面喷涂氧化石墨烯溶液成膜，最后高温烧结，即可在石墨坩埚衬底/石墨加热器衬底的表面复合成一层较厚的耐磨石墨烯层；该耐磨石墨烯层的能在常温下抑制半导体用超高纯石墨的掉粉现象，高温下抑制半导体用超高纯石墨的挥发；并且，其耐磨性好，特别适用于石墨坩埚和石墨加热器的外层防护。
Ultrahigh-purity graphite thermal field for semiconductors
半导体用超高纯石墨热场
YANG ZHENYUAN (author) / BAI JUNPENG (author) / GE ZHENJUN (author) / DING GUANGMING (author) / MA CHANGQING (author)
2024-12-06
Patent
Electronic Resource
Chinese
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