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METHOD FOR MANUFACTURING SUBSTRATE AND SUBSTRATE MANUFACTURED BY SAME
The present invention relates to a method for manufacturing a susceptor, and provides a method for manufacturing a susceptor and a susceptor manufactured by the method, in which a cap-type sleeve structure or a tubular structure is used in a bonding structure of a base material and an insulating plate, according to the present invention, an increase in pressure inside a gas flow path during a curing process can be withstood or prevented, thereby preventing a blocking phenomenon of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) process, reducing contamination around the gas hole, and minimizing the generation of an arc.
本发明涉及一种基座的制造方法，本发明能够提供基座的制造方法以及由所述方法制造的基座，其中，在基底基材和绝缘板的粘合结构中采用帽式套管结构物或管式结构物，从而能够承受在固化过程中气体流路内部的压力的增加或者可防止所述压力的增加，由此能够在高深宽比接触(High Aspect Ratio Contact，HARC)工艺用高功率基座等中防止气孔的堵塞现象，并且降低气孔周围的污染而使得电弧的产生最小化。
METHOD FOR MANUFACTURING SUBSTRATE AND SUBSTRATE MANUFACTURED BY SAME
The present invention relates to a method for manufacturing a susceptor, and provides a method for manufacturing a susceptor and a susceptor manufactured by the method, in which a cap-type sleeve structure or a tubular structure is used in a bonding structure of a base material and an insulating plate, according to the present invention, an increase in pressure inside a gas flow path during a curing process can be withstood or prevented, thereby preventing a blocking phenomenon of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) process, reducing contamination around the gas hole, and minimizing the generation of an arc.
本发明涉及一种基座的制造方法，本发明能够提供基座的制造方法以及由所述方法制造的基座，其中，在基底基材和绝缘板的粘合结构中采用帽式套管结构物或管式结构物，从而能够承受在固化过程中气体流路内部的压力的增加或者可防止所述压力的增加，由此能够在高深宽比接触(High Aspect Ratio Contact，HARC)工艺用高功率基座等中防止气孔的堵塞现象，并且降低气孔周围的污染而使得电弧的产生最小化。
METHOD FOR MANUFACTURING SUBSTRATE AND SUBSTRATE MANUFACTURED BY SAME
基座的制造方法以及通过该方法制造的基座
JI MIN-HO (author) / SUNG KI-MYUNG (author)
2024-12-10
Patent
Electronic Resource
Chinese
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