A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Preparation method of fine-grain alumina ceramic
The invention discloses a preparation method of fine-grain aluminum oxide ceramics, and belongs to the technical field of electrostatic chucks, the preparation method comprises the following steps: powder pretreatment: dispersing nano aluminum oxide powder in a horizontal ball mill, adding a second-phase additive accounting for 1-10% of the total volume fraction, and uniformly stirring; mixing a second phase additive with a solvent, then adding a structure-directing agent PEG and a dispersing agent, carrying out ball milling in a planetary ball mill, and finally transferring the obtained solution into a vertical stirring mill for grinding; sol: firstly adding 60 parts of toluene, 20 parts of isopropanol and 20 parts of plasticizer into a pneumatic sol machine, and then adding 30-50 parts of adhesive; dispersing: weighing a certain amount of 3mm balls and a mixed solvent of methylbenzene and n-butyl alcohol into a stirring mill, then adding the pretreated nano aluminum oxide powder, and stirring; mixing: adding PVB colloid and transferring into a defoaming tank; vacuum defoaming: feeding the slurry in the roller ball mill into a defoaming tank by using N2 air pressure; and forming and sintering.
本发明公开了一种细晶氧化铝陶瓷的制备方法，属于静电卡盘技术领域，所述制备方法包括：粉体预处理：将纳米氧化铝粉体在卧式球磨机中进行分散，加入第二相添加物，第二相添加物体积分数占总体的比例为1～10％，先将第二相添加物与溶剂混合，然后加入结构导向剂PEG和分散剂，在行星球磨机中球磨，最后将所得溶液一起转移到立式搅拌磨中进行研磨；溶胶：先加入60份甲苯、20份异丙醇和20份可塑剂于气动溶胶机内，然后再加入30～50份粘合剂；分散：称量一定量的3mm球只、甲苯和正丁醇混合溶剂于搅拌磨中，然后将预处理的纳米氧化铝粉加入后搅拌；混合：加入PVB胶体转移至脱泡罐中；真空脱泡：将滚筒球磨机中的浆料用N2气压送入脱泡罐后；成型和烧结。
Preparation method of fine-grain alumina ceramic
The invention discloses a preparation method of fine-grain aluminum oxide ceramics, and belongs to the technical field of electrostatic chucks, the preparation method comprises the following steps: powder pretreatment: dispersing nano aluminum oxide powder in a horizontal ball mill, adding a second-phase additive accounting for 1-10% of the total volume fraction, and uniformly stirring; mixing a second phase additive with a solvent, then adding a structure-directing agent PEG and a dispersing agent, carrying out ball milling in a planetary ball mill, and finally transferring the obtained solution into a vertical stirring mill for grinding; sol: firstly adding 60 parts of toluene, 20 parts of isopropanol and 20 parts of plasticizer into a pneumatic sol machine, and then adding 30-50 parts of adhesive; dispersing: weighing a certain amount of 3mm balls and a mixed solvent of methylbenzene and n-butyl alcohol into a stirring mill, then adding the pretreated nano aluminum oxide powder, and stirring; mixing: adding PVB colloid and transferring into a defoaming tank; vacuum defoaming: feeding the slurry in the roller ball mill into a defoaming tank by using N2 air pressure; and forming and sintering.
本发明公开了一种细晶氧化铝陶瓷的制备方法，属于静电卡盘技术领域，所述制备方法包括：粉体预处理：将纳米氧化铝粉体在卧式球磨机中进行分散，加入第二相添加物，第二相添加物体积分数占总体的比例为1～10％，先将第二相添加物与溶剂混合，然后加入结构导向剂PEG和分散剂，在行星球磨机中球磨，最后将所得溶液一起转移到立式搅拌磨中进行研磨；溶胶：先加入60份甲苯、20份异丙醇和20份可塑剂于气动溶胶机内，然后再加入30～50份粘合剂；分散：称量一定量的3mm球只、甲苯和正丁醇混合溶剂于搅拌磨中，然后将预处理的纳米氧化铝粉加入后搅拌；混合：加入PVB胶体转移至脱泡罐中；真空脱泡：将滚筒球磨机中的浆料用N2气压送入脱泡罐后；成型和烧结。
Preparation method of fine-grain alumina ceramic
一种细晶氧化铝陶瓷的制备方法
ZHOU JUN (author) / SHI ZHEYUAN (author) / LI JUN (author) / XIAO WEI (author) / ZHANG QIANWEN (author) / HUANG JINGBIN (author) / YAN JIAFAN (author)
2024-12-13
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
| European Patent Office | 2024
Fine-grain pink ZTA ceramic and preparation method thereof
| European Patent Office | 2020
| European Patent Office | 2022