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Procédé de fabrication d'un substrat en nitrure d'aluminium
Production of an aluminum nitride (AlN) substrate comprises spraying a powder at high temperature and high speed onto a support. The powder comprises AlN particles coated with an oxide precursor giving an oxide that forms a liquid phase around the AlN particles during spraying.
Procédé de fabrication d'un substrat en nitrure d'aluminium
Production of an aluminum nitride (AlN) substrate comprises spraying a powder at high temperature and high speed onto a support. The powder comprises AlN particles coated with an oxide precursor giving an oxide that forms a liquid phase around the AlN particles during spraying.
Procédé de fabrication d'un substrat en nitrure d'aluminium
Method for the production of an aluminium nitride substrate
Verfahren zur Herstellung eines Aluminiumnitridsubstrats
PETITBON M ALAIN (author) / FERRATO M MARC (author) / JARRIGE JEAN (author)
2019-04-10
Patent
Electronic Resource
French
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