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The present invention is intended to drastically improve a precision polishing characteristic of a cordierite-based sintered body which has low thermal expansibility, high dimensional long-term stability and high rigidity (high elastic modulus). The cordierite-based sintered body comprises cordierite as primary components, and one or more selected from the group consisting of La, Ce, Sm, Gd, Dy, Er, Yb and Y in an oxide-equivalent amount of 1 to 8 mass%, without any crystal phase other than a cordierite crystal phase. A mass ratio of primary components of the cordierite satisfies the following relations: 3.85 ¤ SiO 2 / MgO ¤ 4.60, and 2.50 ¤ Al 2 O 3 / MgO ¤ 2.70, and the cordierite-based sintered body after being subjected to precision polishing has a precisely polished surface with an average surface roughness (Ra) of 1 nm or less.
The present invention is intended to drastically improve a precision polishing characteristic of a cordierite-based sintered body which has low thermal expansibility, high dimensional long-term stability and high rigidity (high elastic modulus). The cordierite-based sintered body comprises cordierite as primary components, and one or more selected from the group consisting of La, Ce, Sm, Gd, Dy, Er, Yb and Y in an oxide-equivalent amount of 1 to 8 mass%, without any crystal phase other than a cordierite crystal phase. A mass ratio of primary components of the cordierite satisfies the following relations: 3.85 ¤ SiO 2 / MgO ¤ 4.60, and 2.50 ¤ Al 2 O 3 / MgO ¤ 2.70, and the cordierite-based sintered body after being subjected to precision polishing has a precisely polished surface with an average surface roughness (Ra) of 1 nm or less.
CORDIERITE SINTERED BODY
CORDIERIT-SINTERKÖRPER
CORPS FRITTÉ DE CORDIÉRITE
SUGAWARA JUN (author)
2018-05-02
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME