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VORRICHTUNG UND VERFAHREN ZUR OPTISCHEN ÜBERPRÜFUNG EINER PROBE
Method and device for optical inspection of a sample using spectral interferometry, wherein a beam (2″) emitted by a radiation source (1) is directed onto the sample (5) and a reference beam (2′) is directed onto a reference sample (4), and the spectral interference of both beams after being reflected on the samples or after passing the samples is recorded by means of a spectrograph (6); the interferogram I(ω) thus obtained is numerically derived with respect to the angular frequency ω. For the function I′(ω) thus obtained the zeros ωi are calculated numerically as solutions to the equation I′(ω)=0 and the frequency-dependent group delay τ(ω) is then calculated from the zeros ωi according to the equation τ(ωn)=π/(ωi+1−ωi), wherein i=1, 2 . . . and ωn=(ωi+1+ωi)2.
VORRICHTUNG UND VERFAHREN ZUR OPTISCHEN ÜBERPRÜFUNG EINER PROBE
Method and device for optical inspection of a sample using spectral interferometry, wherein a beam (2″) emitted by a radiation source (1) is directed onto the sample (5) and a reference beam (2′) is directed onto a reference sample (4), and the spectral interference of both beams after being reflected on the samples or after passing the samples is recorded by means of a spectrograph (6); the interferogram I(ω) thus obtained is numerically derived with respect to the angular frequency ω. For the function I′(ω) thus obtained the zeros ωi are calculated numerically as solutions to the equation I′(ω)=0 and the frequency-dependent group delay τ(ω) is then calculated from the zeros ωi according to the equation τ(ωn)=π/(ωi+1−ωi), wherein i=1, 2 . . . and ωn=(ωi+1+ωi)2.
VORRICHTUNG UND VERFAHREN ZUR OPTISCHEN ÜBERPRÜFUNG EINER PROBE
DEVICE AND METHOD FOR OPTICAL INSPECTION OF A SAMPLE
DISPOSITIF ET PROCÉDÉ DE CONTRÔLE OPTIQUE D'UN ÉCHANTILLON
TEMPEA GABRIEL-FLORIN (author)
2015-09-16
Patent
Electronic Resource
German
IPC:
G01J
Messen der Intensität, der Geschwindigkeit, der spektralen Zusammensetzung, der Polarisation, der Phase oder der Pulscharakteristik von infrarotem, sichtbarem oder ultraviolettem Licht
,
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
/
E01H
STREET CLEANING
,
Reinigen von Straßen
/
G01M
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES
,
Prüfen der statischen oder dynamischen Massenverteilung rotierender Teile von Maschinen oder Konstruktionen
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
/
G02B
Optische Elemente, Systeme oder Geräte
,
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
Verfahren zur Überprüfung des Zustandes einer dynamischen Vorrichtung
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