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MOLYBDENUM DISILICIDE HEATING ELEMENT WHICH CONTAINS TUNGSTEN
Provided is a tungsten molybdenum disilicide heater which includes tungsten molybdenum disilicide represented by a composition formula: (Mo x W 1-x ) Si 2 , wherein x = 0.6 to 0.7 and which the tungsten molybdenum disilicide further contains a yttrium oxide or a yttrium silicate. It is possible to provide a tungsten-containing molybdenum disilicide heater that has an excellent oxidation resistance characteristic and a low evaporation rate, and that can be used at a temperature higher than a conventional molybdenum disilicide heater; and it is useful as a heating element (heater) that can be more stable at a high temperature as compared with a conventional heater.
MOLYBDENUM DISILICIDE HEATING ELEMENT WHICH CONTAINS TUNGSTEN
Provided is a tungsten molybdenum disilicide heater which includes tungsten molybdenum disilicide represented by a composition formula: (Mo x W 1-x ) Si 2 , wherein x = 0.6 to 0.7 and which the tungsten molybdenum disilicide further contains a yttrium oxide or a yttrium silicate. It is possible to provide a tungsten-containing molybdenum disilicide heater that has an excellent oxidation resistance characteristic and a low evaporation rate, and that can be used at a temperature higher than a conventional molybdenum disilicide heater; and it is useful as a heating element (heater) that can be more stable at a high temperature as compared with a conventional heater.
MOLYBDENUM DISILICIDE HEATING ELEMENT WHICH CONTAINS TUNGSTEN
WOLFRAM ENTHALTENDES MOLYBDÄN-DISILIZID HEIZELEMENT
ELEMENT DE CHAUFFAGE EN MOLYBDÈNE DISILICIDE CONTENANT DU TUNGSTÈNE
TAKAMURA HIROSH (author) / NARITA SATOYASU (author)
2019-01-30
Patent
Electronic Resource
English
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