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PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE
A method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high density thereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.
PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE
A method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high density thereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.
PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE
METHOD FOR PREPARING CERAMICS, CERAMICS THUS OBTAINED AND USES THEREOF, PARTICULARLY AS A TARGET FOR CATHODE SPUTTERING
HERSTELLUNGSVERFAHREN VON KERAMIKEN, SO ERHALTENE KERAMIKEN UND IHRE VERWENDUNG ALS ZIELSCHEIBE FÜR KATHODENZERSTÄUBUNG
CAMPET GUY (author) / SAADEDDIN IYAD (author) / ZAGHIB KARIM (author)
2020-03-18
Patent
Electronic Resource
French
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